{"id":5169,"date":"2026-07-17T16:51:36","date_gmt":"2026-07-17T08:51:36","guid":{"rendered":"https:\/\/www.opticalcutting.com\/?p=5169"},"modified":"2026-07-17T16:51:38","modified_gmt":"2026-07-17T08:51:38","slug":"thiet-bi-san-xuat-quang-hoc-laser-co2","status":"publish","type":"post","link":"https:\/\/www.opticalcutting.com\/vi\/thiet-bi-san-xuat-quang-hoc-laser-co2\/","title":{"rendered":"Thi\u1ebft b\u1ecb S\u1ea3n xu\u1ea5t Quang h\u1ecdc Laser CO2: Nh\u1eefng g\u00ec b\u1ea1n c\u1ea7n \u0111\u1ec3 X\u00e2y d\u1ef1ng m\u1ed9t D\u00e2y chuy\u1ec1n S\u1ea3n xu\u1ea5t"},"content":{"rendered":"

M\u1ed7i \u0111\u1ea7u c\u1eaft laser CO\u2082 ch\u1ee9a m\u1ed9t b\u1ed9 quang h\u1ecdc k\u1ebdm selenide m\u00e0 ch\u00f9m tia laser \u0111i qua tr\u01b0\u1edbc khi ch\u1ea1m v\u00e0o ph\u00f4i. C\u00e1c th\u1ea5u k\u00ednh, c\u1eeda s\u1ed5 v\u00e0 b\u1ed9 gh\u00e9p n\u1ed1i \u0111\u1ea7u ra \u0111\u00f3 l\u00e0 v\u1eadt t\u01b0 ti\u00eau hao \u2014 ch\u00fang h\u1ea5p th\u1ee5 m\u1ed9t ph\u1ea7n c\u1ee7a m\u1ed7i xung, t\u00edch t\u1ee5 b\u1ee5i b\u1ea9n v\u00e0 cu\u1ed1i c\u00f9ng b\u1ecb h\u1ecfng. C\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t h\u1ec7 th\u1ed1ng laser ph\u1ee5 thu\u1ed9c v\u00e0o m\u1ed9t nh\u00e0 cung c\u1ea5p quang h\u1ecdc b\u00ean ngo\u00e0i duy nh\u1ea5t \u0111\u1ec3 thay th\u1ebf c\u00f3 nguy c\u01a1 ng\u1eebng s\u1ea3n xu\u1ea5t do m\u1ed9t l\u1ea7n gi\u00e1n \u0111o\u1ea1n chu\u1ed7i cung \u1ee9ng.<\/p>\n\n\n\n

X\u00e2y d\u1ef1ng n\u0103ng l\u1ef1c s\u1ea3n xu\u1ea5t quang h\u1ecdc laser CO\u2082 n\u1ed9i b\u1ed9 s\u1ebd thay \u0111\u1ed5i \u0111i\u1ec1u \u0111\u00f3. N\u00f3 c\u0169ng thay \u0111\u1ed5i c\u01a1 c\u1ea5u chi ph\u00ed c\u1ee7a b\u1ea1n: m\u1ed9t d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t \u0111\u01b0\u1ee3c c\u1ea5u h\u00ecnh t\u1ed1t c\u00f3 th\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c th\u1ea5u k\u00ednh l\u1ea5y n\u00e9t ZnSe v\u1edbi chi ph\u00ed b\u1eb1ng 30\u201350% chi ph\u00ed quang h\u1ecdc mua ngo\u00e0i t\u01b0\u01a1ng \u0111\u01b0\u01a1ng \u1edf quy m\u00f4 l\u1edbn. C\u00e2u h\u1ecfi \u0111\u1eb7t ra l\u00e0 b\u1ea1n th\u1ef1c s\u1ef1 c\u1ea7n thi\u1ebft b\u1ecb n\u00e0o, theo tr\u00ecnh t\u1ef1 n\u00e0o v\u00e0 \u1edf quy m\u00f4 s\u1ea3n xu\u1ea5t n\u00e0o th\u00ec kho\u1ea3n \u0111\u1ea7u t\u01b0 \u0111\u00f3 c\u00f3 \u00fd ngh\u0129a.<\/p>\n\n\n\n

H\u01b0\u1edbng d\u1eabn n\u00e0y bao g\u1ed3m thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t quang h\u1ecdc laser CO\u2082 t\u1eebng giai \u0111o\u1ea1n \u2014 t\u1eeb ph\u00f4i ZnSe CVD th\u00f4 \u0111\u1ebfn th\u1ea5u k\u00ednh ho\u00e0n ch\u1ec9nh, ph\u1ee7 AR \u2014 v\u1edbi c\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt thi\u1ebft b\u1ecb ph\u00f9 h\u1ee3p v\u1edbi ba quy m\u00f4 s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n

\"Vimfun
Loop-type diamond wire saw for graphite,optical glass and so on.<\/figcaption><\/figure>\n\n\n\n

T\u1ea1i sao ZnSe Th\u1ed1ng tr\u1ecb S\u1ea3n xu\u1ea5t Quang h\u1ecdc Laser CO\u2082<\/h2>\n\n\n\n

Laser CO\u2082 ho\u1ea1t \u0111\u1ed9ng \u1edf b\u01b0\u1edbc s\u00f3ng 10,6 \u03bcm, m\u1ed9t b\u01b0\u1edbc s\u00f3ng m\u00e0 k\u00ednh quang h\u1ecdc th\u00f4ng th\u01b0\u1eddng ho\u00e0n to\u00e0n kh\u00f4ng trong su\u1ed1t. C\u00e1c l\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u cho quang h\u1ecdc laser CO\u2082 truy\u1ec1n qua b\u1ecb h\u1ea1n ch\u1ebf: ZnSe, ZnS v\u00e0 germanium cho d\u1ea3i h\u1ed3ng ngo\u1ea1i, v\u1edbi ZnSe chi\u1ebfm \u01b0u th\u1ebf cho c\u00e1c b\u1ed9 ph\u1eadn truy\u1ec1n qua v\u00ec n\u00f3 k\u1ebft h\u1ee3p s\u1ef1 h\u1ea5p th\u1ee5 th\u1ea5p nh\u1ea5t \u1edf 10,6 \u03bcm v\u1edbi ch\u1ec9 s\u1ed1 kh\u00fac x\u1ea1 \u0111\u1ee7 cao cho thi\u1ebft k\u1ebf th\u1ea5u k\u00ednh nh\u1ecf g\u1ecdn.<\/p>\n\n\n\n

ZnSe CVD c\u1ea5p laser \u0111\u1ea1t \u0111\u01b0\u1ee3c s\u1ef1 h\u1ea5p th\u1ee5 kh\u1ed1i d\u01b0\u1edbi 0,0005 cm\u207b\u00b9 \u1edf 10,6 \u03bcm \u2014 ngh\u0129a l\u00e0 m\u1ed9t th\u1ea5u k\u00ednh d\u00e0y 10 mm h\u1ea5p th\u1ee5 d\u01b0\u1edbi 0,5% n\u0103ng l\u01b0\u1ee3ng t\u1edbi tr\u00ean m\u1ed7i l\u1ea7n \u0111i qua. S\u1ef1 h\u1ea5p th\u1ee5 th\u1ea5p n\u00e0y cho ph\u00e9p c\u00e1c th\u1ea5u k\u00ednh l\u1ea5y n\u00e9t ZnSe ch\u1ecbu \u0111\u01b0\u1ee3c ch\u00f9m tia CO\u2082 c\u00f4ng su\u1ea5t kilowatt li\u00ean t\u1ee5c m\u00e0 kh\u00f4ng b\u1ecb qu\u00e1 nhi\u1ec7t. So v\u1edbi germanium, n\u00f3 c\u00f3 \u0111\u1ed9 h\u1ea5p th\u1ee5 cao h\u01a1n kho\u1ea3ng 40 l\u1ea7n v\u00e0 kh\u00f4ng th\u1ec3 s\u1eed d\u1ee5ng cho quang h\u1ecdc truy\u1ec1n qua c\u00f4ng su\u1ea5t cao.<\/p>\n\n\n\n

H\u1eadu qu\u1ea3 \u0111\u1ed1i v\u1edbi c\u00e1c l\u1ef1a ch\u1ecdn thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t quang h\u1ecdc laser CO\u2082: m\u1ecdi th\u1ee9 tr\u00ean d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t c\u1ee7a b\u1ea1n ph\u1ea3i \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a cho s\u1ef1 k\u1ebft h\u1ee3p \u0111\u1eb7c t\u00ednh c\u1ee7a ZnSe \u2014 m\u1ec1m, gi\u00f2n v\u00e0 h\u01a1i \u0111\u1ed9c \u1edf d\u1ea1ng h\u1ea1t. Thi\u1ebft b\u1ecb ho\u1ea1t \u0111\u1ed9ng t\u1ed1t v\u1edbi k\u00ednh ho\u1eb7c germanium th\u01b0\u1eddng y\u00eau c\u1ea7u s\u1eeda \u0111\u1ed5i th\u00f4ng s\u1ed1 cho ZnSe.<\/p>\n\n\n\n

Thi\u1ebft b\u1ecb S\u1ea3n xu\u1ea5t Quang h\u1ecdc Laser CO\u2082: Chu\u1ed7i B\u1ed1n Giai \u0111o\u1ea1n<\/h2>\n\n\n\n

M\u1ed9t d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t quang h\u1ecdc laser CO\u2082 ho\u00e0n ch\u1ec9nh bao g\u1ed3m b\u1ed1n giai \u0111o\u1ea1n x\u1eed l\u00fd. M\u1ed7i giai \u0111o\u1ea1n c\u00f3 y\u00eau c\u1ea7u thi\u1ebft b\u1ecb c\u1ee5 th\u1ec3 v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng \u0111\u1ea7u ra c\u1ee7a m\u1ed7i giai \u0111o\u1ea1n \u0111\u1eb7t \u0111i\u1ec1u ki\u1ec7n \u0111\u1ea7u v\u00e0o cho giai \u0111o\u1ea1n ti\u1ebfp theo.<\/p>\n\n\n\n

Giai \u0111o\u1ea1n<\/th>Qu\u00e1 tr\u00ecnh<\/th>Lo\u1ea1i thi\u1ebft b\u1ecb<\/th>Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt \u0111\u1ea7u ra<\/th><\/tr><\/thead>
1<\/td>C\u1eaft ph\u00f4i<\/td>C\u01b0a d\u00e2y kim c\u01b0\u01a1ng<\/td>Ra 0,6\u20131,5 \u03bcm, TTV < 15 \u03bcm<\/td><\/tr>
2<\/td>T\u1ea1o \u0111\u01b0\u1eddng cong + m\u00e0i<\/td>M\u00e1y m\u00e0i c\u1ea7u CNC<\/td>Ra 0,1\u20130,3 \u03bcm, chi\u1ec1u cao sagittal \u00b10,5%<\/td><\/tr>
3<\/td>Polishing<\/td>H\u1ec7 th\u1ed1ng \u0111\u00e1nh b\u00f3ng ch\u00ednh x\u00e1c<\/td>Ra < 5 nm, h\u00ecnh d\u1ea1ng b\u1ec1 m\u1eb7t \u03bb\/4 P-V<\/td><\/tr>
4<\/td>Ph\u1ee7 AR<\/td>H\u1ec7 th\u1ed1ng l\u1eafng \u0111\u1ecdng ch\u00e2n kh\u00f4ng<\/td>Ph\u1ea3n x\u1ea1 < 0,3% \u1edf 10,6 \u03bcm<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

C\u1ed5ng ch\u1ea5t l\u01b0\u1ee3ng gi\u1eefa c\u00e1c giai \u0111o\u1ea1n quy\u1ebft \u0111\u1ecbnh n\u0103ng su\u1ea5t t\u1ed5ng th\u1ec3 c\u1ee7a b\u1ea1n. M\u1ed9t ph\u00f4i r\u1eddi kh\u1ecfi m\u00e1y c\u1eaft v\u1edbi Ra 2,0 \u03bcm thay v\u00ec 0,8 \u03bcm y\u00eau c\u1ea7u hai l\u1ea7n m\u00e0i b\u1ed5 sung \u0111\u1ec3 \u0111\u1ea1t th\u00f4ng s\u1ed1 \u0111\u1ea7u v\u00e0o \u0111\u00e1nh b\u00f3ng \u2014 l\u00e0m t\u0103ng th\u1eddi gian chu k\u1ef3 v\u00e0 r\u1ee7i ro h\u01b0 h\u1ecfng d\u01b0\u1edbi b\u1ec1 m\u1eb7t.<\/p>\n\n\n\n

Thi\u1ebft b\u1ecb S\u1ea3n xu\u1ea5t Quang h\u1ecdc Laser CO\u2082 Giai \u0111o\u1ea1n 1: C\u1eaft ph\u00f4i<\/h2>\n\n\n\n

ZnSe CVD \u0111\u01b0\u1ee3c nu\u00f4i c\u1ea5y th\u00e0nh c\u00e1c kh\u1ed1i l\u1edbn, th\u01b0\u1eddng l\u00e0 h\u00ecnh tr\u1ee5 \u0111\u01b0\u1eddng k\u00ednh 150\u2013300 mm. B\u01b0\u1edbc s\u1ea3n xu\u1ea5t \u0111\u1ea7u ti\u00ean l\u00e0 c\u1eaft c\u00e1c kh\u1ed1i n\u00e0y th\u00e0nh c\u00e1c \u0111\u0129a \u0111\u01b0\u1eddng k\u00ednh th\u1ea5u k\u00ednh v\u1edbi \u0111\u1ed9 d\u00e0y m\u1ee5c ti\u00eau c\u1ed9ng v\u1edbi v\u1eadt li\u1ec7u m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng.<\/p>\n\n\n\n

C\u1eaft d\u00e2y kim c\u01b0\u01a1ng l\u00e0 c\u00f4ng ngh\u1ec7 c\u1eaft ph\u00f9 h\u1ee3p cho ZnSe. D\u00e2y ti\u1ebfp x\u00fac v\u1edbi v\u1eadt li\u1ec7u d\u1ecdc theo m\u1ed9t \u0111\u01b0\u1eddng h\u1eb9p, ph\u00e2n b\u1ed5 l\u1ef1c c\u1eaft d\u1ecdc theo chi\u1ec1u d\u00e0i d\u00e2y v\u00e0 duy tr\u00ec d\u00f2ng ch\u1ea5t l\u00e0m m\u00e1t li\u00ean t\u1ee5c \u0111\u1ec3 ng\u0103n ng\u1eeba t\u00edch t\u1ee5 nhi\u1ec7t t\u1ea1i giao di\u1ec7n c\u1eaft. \u0110\u1ed1i v\u1edbi ri\u00eang ZnSe, ba th\u00f4ng s\u1ed1 c\u1eaft y\u00eau c\u1ea7u \u0111i\u1ec1u ch\u1ec9nh so v\u1edbi c\u00e0i \u0111\u1eb7t cho k\u00ednh ho\u1eb7c germanium:<\/p>\n\n\n\n

Feed rate:<\/strong> 3\u20136 mm\/ph\u00fat \u0111\u1ed1i v\u1edbi ZnSe, so v\u1edbi 8\u201312 mm\/ph\u00fat \u0111\u1ed1i v\u1edbi k\u00ednh quang h\u1ecdc \u1edf c\u00f9ng \u0111\u01b0\u1eddng k\u00ednh d\u00e2y. \u0110\u1ed9 b\u1ec1n ch\u1ed1ng n\u1ee9t g\u00e3y th\u1ea5p c\u1ee7a ZnSe c\u00f3 ngh\u0129a l\u00e0 t\u1ed1c \u0111\u1ed9 ti\u1ebfn dao m\u1ea1nh t\u1ea1o ra c\u00e1c v\u1ebft n\u1ee9t \u1edf c\u1ea1nh v\u00e0 v\u1ebft n\u1ee9t d\u01b0\u1edbi b\u1ec1 m\u1eb7t \u0111\u00f2i h\u1ecfi c\u00e1c l\u1ea7n m\u00e0i b\u1ed5 sung.<\/p>\n\n\n\n

\u0110\u01b0\u1eddng k\u00ednh d\u00e2y:<\/strong> 0,35\u20130,50 mm cho h\u1ea7u h\u1ebft c\u00e1c quang h\u1ecdc laser CO\u2082. D\u00e2y m\u1ea3nh h\u01a1n (0,25 mm) l\u00e0m gi\u1ea3m t\u1ed5n th\u1ea5t kerf nh\u01b0ng y\u00eau c\u1ea7u t\u1ed1c \u0111\u1ed9 ti\u1ebfn dao th\u1ea5p h\u01a1n v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c ki\u1ec3m so\u00e1t \u0111\u1ed9 c\u0103ng cao h\u01a1n.<\/p>\n\n\n\n

Coolant:<\/strong> D\u1ea7u kho\u00e1ng tr\u1eafng, kh\u00f4ng d\u00f9ng ch\u1ea5t l\u1ecfng g\u1ed1c n\u01b0\u1edbc. ZnSe c\u00f3 th\u1ec3 b\u1ecb \u1ed1 b\u1ec1 m\u1eb7t khi ti\u1ebfp x\u00fac v\u1edbi ch\u1ea5t l\u00e0m m\u00e1t g\u1ed1c n\u01b0\u1edbc v\u00e0 v\u1ebft \u1ed1 n\u00e0y r\u1ea5t kh\u00f3 lo\u1ea1i b\u1ecf tr\u01b0\u1edbc khi m\u00e0i.<\/p>\n\n\n\n

Our M\u00e1y c\u1eaft th\u1ea5u k\u00ednh ZnSe<\/a> V\u00e0 M\u00e1y c\u1eaft k\u00ednh dao \u0111\u1ed9ng d\u00e2y SGSM-40<\/a> x\u1eed l\u00fd c\u00e1c ph\u00f4i ZnSe c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u00ean \u0111\u1ebfn 300 mm v\u1edbi h\u1ec7 th\u1ed1ng \u0111i\u1ec1u ch\u1ec9nh \u0111\u1ed9 c\u0103ng \u0111i\u1ec1u khi\u1ec3n b\u1eb1ng servo duy tr\u00ec l\u1ef1c d\u00e2y kh\u00f4ng \u0111\u1ed5i trong to\u00e0n b\u1ed9 \u0111\u1ed9 s\u00e2u c\u1eaft.<\/p>\n\n\n\n

\"Vimfun
Loop-type diamond wire saw for graphite,optical glass and so on.<\/figcaption><\/figure>\n\n\n\n

Thi\u1ebft b\u1ecb S\u1ea3n xu\u1ea5t Quang h\u1ecdc Laser CO\u2082 Giai \u0111o\u1ea1n 2: M\u00e0i<\/h2>\n\n\n\n

M\u00e0i ph\u1ee5c v\u1ee5 hai ch\u1ee9c n\u0103ng trong s\u1ea3n xu\u1ea5t quang h\u1ecdc laser CO\u2082: n\u00f3 t\u1ea1o ra \u0111\u1ed9 cong c\u1ee7a th\u1ea5u k\u00ednh (c\u1ea7u ho\u1eb7c phi c\u1ea7u) v\u00e0 lo\u1ea1i b\u1ecf l\u1edbp h\u01b0 h\u1ecfng d\u01b0\u1edbi b\u1ec1 m\u1eb7t c\u00f2n s\u00f3t l\u1ea1i sau khi c\u1eaft. C\u1ea3 hai ch\u1ee9c n\u0103ng ph\u1ea3i \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n \u0111\u1ed3ng th\u1eddi \u2014 m\u1ed9t m\u00e1y t\u1ea1o ra \u0111\u1ed9 cong t\u1ed1t nh\u01b0ng \u0111\u1ec3 l\u1ea1i h\u01b0 h\u1ecfng d\u01b0\u1edbi b\u1ec1 m\u1eb7t s\u00e2u s\u1ebd d\u1eabn \u0111\u1ebfn l\u1ed7i \u0111\u00e1nh b\u00f3ng \u1edf c\u00e1c giai \u0111o\u1ea1n sau.<\/p>\n\n\n\n

\u0110\u1ed1i v\u1edbi quang h\u1ecdc laser CO\u2082 ZnSe, vi\u1ec7c l\u1ef1a ch\u1ecdn \u0111\u00e1 m\u00e0i quan tr\u1ecdng h\u01a1n \u0111\u1ed1i v\u1edbi c\u00e1c v\u1eadt li\u1ec7u c\u1ee9ng h\u01a1n:<\/p>\n\n\n\n

T\u1ea1o th\u00f4:<\/strong> \u0110\u00e1 kim c\u01b0\u01a1ng D46\u2013D91, li\u00ean k\u1ebft nh\u1ef1a ho\u1eb7c kim lo\u1ea1i. ZnSe m\u00e0i nhanh h\u01a1n germanium \u1edf c\u00f9ng th\u00f4ng s\u1ed1 \u2014 gi\u1ea3m t\u1ed1c \u0111\u1ed9 \u0103n dao 30\u201340% so v\u1edbi c\u00e0i \u0111\u1eb7t cho germanium \u0111\u1ec3 duy tr\u00ec ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t t\u01b0\u01a1ng \u0111\u01b0\u01a1ng.<\/p>\n\n\n\n

M\u00e0i tinh:<\/strong> \u0110\u00e1 kim c\u01b0\u01a1ng D7\u2013D15, li\u00ean k\u1ebft nh\u1ef1a. \u0110\u1ed9 m\u1ec1m c\u1ee7a ZnSe c\u00f3 ngh\u0129a l\u00e0 h\u1ea1t m\u1ecbn lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u nhanh ch\u00f3ng; gi\u1ea3m \u0111\u1ed9 s\u00e2u m\u1ed7i l\u1ea7n m\u00e0i xu\u1ed1ng 2\u20133 \u03bcm cho c\u00e1c l\u1ea7n m\u00e0i tinh.<\/p>\n\n\n\n

M\u1ed9t sai l\u1ea7m ph\u1ed5 bi\u1ebfn v\u1edbi ZnSe l\u00e0 \u00e1p d\u1ee5ng c\u00e1c th\u00f4ng s\u1ed1 m\u00e0i gi\u1ed1ng nh\u01b0 \u0111\u1ed1i v\u1edbi k\u00ednh quang h\u1ecdc. K\u00ednh v\u00e0 ZnSe c\u00f3 \u0111\u1ed9 c\u1ee9ng t\u01b0\u01a1ng t\u1ef1 (ZnSe Knoop ~120, BK7 Knoop ~600) \u2014 \u0111\u1ee3i \u0111\u00e3, ZnSe th\u1ef1c s\u1ef1 m\u1ec1m h\u01a1n k\u00ednh. X\u1eed l\u00fd ZnSe v\u1edbi th\u00f4ng s\u1ed1 c\u1ee7a k\u00ednh t\u1ea1o ra c\u00e1c b\u1ec1 m\u1eb7t b\u1ecb c\u1eaft qu\u00e1 m\u1ee9c \u0111\u00f2i h\u1ecfi ph\u1ea3i lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u \u0111\u00e1nh b\u00f3ng b\u1ed5 sung.<\/p>\n\n\n\n

Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt \u0111\u1ed9 \u0111\u1ea3o tr\u1ee5c ch\u00ednh cho vi\u1ec7c m\u00e0i ZnSe ph\u1ea3i l\u00e0 \u2264 1 \u03bcm TIR. \u0110\u1ed9 \u0111\u1ea3o cao h\u01a1n t\u1ea1o ra b\u1ec1 m\u1eb7t g\u1ee3n s\u00f3ng bi\u1ec3u hi\u1ec7n d\u01b0\u1edbi d\u1ea1ng s\u00f3ng c\u00f3 t\u1ea7n s\u1ed1 kh\u00f4ng gian cao m\u00e0 qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng kh\u00f4ng th\u1ec3 lo\u1ea1i b\u1ecf ho\u00e0n to\u00e0n trong gi\u1edbi h\u1ea1n v\u1eadt li\u1ec7u \u0111\u00e1nh b\u00f3ng th\u00f4ng th\u01b0\u1eddng.<\/p>\n\n\n\n

Thi\u1ebft b\u1ecb S\u1ea3n xu\u1ea5t Quang h\u1ecdc Laser CO\u2082 Giai \u0111o\u1ea1n 3: \u0110\u00e1nh b\u00f3ng<\/h2>\n\n\n\n

\u0110\u00e1nh b\u00f3ng l\u00e0 n\u01a1i c\u00e1c b\u1ed9 ph\u1eadn quang h\u1ecdc laser CO\u2082 \u0111\u1ea1t \u0111\u01b0\u1ee3c ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t c\u1ea5p laser ho\u1eb7c th\u1ea5t b\u1ea1i. M\u1ee5c ti\u00eau cho c\u00e1c th\u1ea5u k\u00ednh h\u1ed9i t\u1ee5 ZnSe laser CO\u2082 c\u00f4ng su\u1ea5t cao \u2014 Ra < 5 nm, h\u00ecnh d\u1ea1ng b\u1ec1 m\u1eb7t \u03bb\/4 P-V, x\u01b0\u1edbc-r\u1ed7 40-20 \u2014 y\u00eau c\u1ea7u m\u1ed9t h\u1ec7 th\u1ed1ng \u0111\u00e1nh b\u00f3ng v\u1edbi \u0111i\u1ec1u khi\u1ec3n \u00e1p su\u1ea5t ch\u00ednh x\u00e1c \u0111\u1ebfn \u00b10,5 kPa, cung c\u1ea5p b\u00f9n \u1ed5n \u0111\u1ecbnh nhi\u1ec7t \u0111\u1ed9 v\u00e0 c\u00e1c c\u1ea5u h\u00ecnh t\u1ed1c \u0111\u1ed9 quay \u0111\u00e1 \u0111\u00e1nh b\u00f3ng c\u00f3 th\u1ec3 l\u1eadp tr\u00ecnh.<\/p>\n\n\n\n

\u0110\u00e1nh b\u00f3ng ZnSe s\u1eed d\u1ee5ng c\u00e1c h\u1ea1t m\u00e0i m\u1ecbn h\u01a1n v\u00e0 \u00e1p su\u1ea5t th\u1ea5p h\u01a1n so v\u1edbi germanium:<\/p>\n\n\n\n

Giai \u0111o\u1ea1n \u0111\u00e1nh b\u00f3ng<\/th>V\u1eadt li\u1ec7u m\u00e0i<\/th>N\u1ed3ng \u0111\u1ed9<\/th>\u00c1p su\u1ea5t<\/th>T\u1ed1c \u0111\u1ed9 lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u<\/th><\/tr><\/thead>
\u0110\u00e1nh b\u00f3ng th\u00f4<\/td>Alumina 1 \u03bcm<\/td>5\u201310%<\/td>3\u20135 kPa<\/td>0,5\u20131,0 \u03bcm\/ph\u00fat<\/td><\/tr>
\u0110\u00e1nh b\u00f3ng b\u00e1n tinh<\/td>Kim c\u01b0\u01a1ng 0,5 \u03bcm<\/td>2\u20135%<\/td>2\u20134 kPa<\/td>0,2\u20130,5 \u03bcm\/ph\u00fat<\/td><\/tr>
\u0110\u00e1nh b\u00f3ng ho\u00e0n thi\u1ec7n<\/td>Kim c\u01b0\u01a1ng 0,1 \u03bcm ho\u1eb7c silica keo<\/td>1\u20133%<\/td>1\u20133 kPa<\/td>0,05\u20130,1 \u03bcm\/ph\u00fat<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

C\u00e1c gi\u00e1 tr\u1ecb \u00e1p su\u1ea5t tr\u00ean th\u1ea5p h\u01a1n 40\u201360% so v\u1edbi c\u00e1c giai \u0111o\u1ea1n t\u01b0\u01a1ng \u0111\u01b0\u01a1ng \u0111\u1ec3 \u0111\u00e1nh b\u00f3ng gecmani. \u00c1p d\u1ee5ng \u00e1p su\u1ea5t \u0111\u00e1nh b\u00f3ng gecmani l\u00ean ZnSe t\u1ea1o ra k\u1ebft c\u1ea5u v\u1ecf cam \u2014 m\u1ed9t hi\u1ec7n v\u1eadt ranh gi\u1edbi h\u1ea1t hi\u1ec3n th\u1ecb d\u01b0\u1edbi \u00e1nh s\u00e1ng xi\u00ean \u2014 kh\u00f4ng \u0111\u1ea1t ki\u1ec3m tra giao thoa k\u1ebf v\u00e0 y\u00eau c\u1ea7u quay l\u1ea1i \u0111\u00e1nh b\u00f3ng b\u00e1n tinh \u0111\u1ec3 lo\u1ea1i b\u1ecf.<\/p>\n\n\n\n

\u0110\u1ed1i v\u1edbi quang h\u1ecdc laser CO\u2082, \u1edf quy m\u00f4 s\u1ea3n xu\u1ea5t, h\u1ec7 th\u1ed1ng \u0111\u00e1nh b\u00f3ng c\u0169ng c\u1ea7n tu\u1ea7n ho\u00e0n b\u00f9n k\u00edn v\u00e0 kh\u00ed th\u1ea3i l\u1ecdc HEPA \u0111\u1ec3 ch\u1ee9a c\u00e1c h\u1ea1t selenium. H\u1ec7 th\u1ed1ng c\u1ee7a ch\u00fang t\u00f4i t\u00edch h\u1ee3p qu\u1ea3n l\u00fd b\u00f9n v\u00f2ng k\u00edn v\u1edbi c\u1ea5u h\u00ecnh \u00e1p su\u1ea5t t\u1ef1 \u0111\u1ed9ng trong chu tr\u00ecnh \u0111\u00e1nh b\u00f3ng. \u0110\u00e1nh b\u00f3ng quang h\u1ecdc K\u1ebdm Selenide<\/a> Giai \u0111o\u1ea1n 4: Ph\u1ee7 AR cho Quang h\u1ecdc Laser CO\u2082.<\/p>\n\n\n\n

\"Vimfun
Loop-type diamond wire saw for graphite,optical glass and so on.<\/figcaption><\/figure>\n\n\n\n

ZnSe ch\u01b0a ph\u1ee7 ph\u1ea3n x\u1ea1 kho\u1ea3ng 17% b\u1ee9c x\u1ea1 10,6 \u03bcm t\u1edbi tr\u00ean m\u1ed7i b\u1ec1 m\u1eb7t. \u0110\u1ed1i v\u1edbi m\u1ed9t th\u1ea5u k\u00ednh l\u1ea5y n\u00e9t c\u00f3 hai b\u1ec1 m\u1eb7t, \u0111i\u1ec1u \u0111\u00f3 c\u00f3 ngh\u0129a l\u00e0 32% c\u00f4ng su\u1ea5t laser b\u1ecb ph\u1ea3n x\u1ea1 thay v\u00ec truy\u1ec1n \u0111i \u2014 t\u1ea1o ra ph\u1ea3n x\u1ea1 ng\u01b0\u1ee3c v\u00e0 gi\u1ea3m hi\u1ec7u qu\u1ea3 truy\u1ec1n t\u1ea3i. L\u1edbp ph\u1ee7 AR l\u00e0m gi\u1ea3m \u0111\u1ed9 ph\u1ea3n x\u1ea1 tr\u00ean m\u1ed7i b\u1ec1 m\u1eb7t xu\u1ed1ng d\u01b0\u1edbi 0,3% cho d\u1ea3i 10,6 \u03bcm.<\/h2>\n\n\n\n

L\u1edbp ph\u1ee7 AR laser CO\u2082 th\u01b0\u1eddng l\u00e0 m\u1ed9t ch\u1ed3ng m\u00e0ng m\u1ecfng nhi\u1ec1u l\u1edbp \u0111\u01b0\u1ee3c l\u1eafng \u0111\u1ecdng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p bay h\u01a1i ch\u00f9m tia \u0111i\u1ec7n t\u1eed ho\u1eb7c l\u1eafng \u0111\u1ecdng h\u1ed7 tr\u1ee3 ion. Thi\u1ebft b\u1ecb ph\u1ee7 y\u00eau c\u1ea7u:.<\/p>\n\n\n\n

Bu\u1ed3ng ch\u00e2n kh\u00f4ng:<\/p>\n\n\n\n

    \n
  • \u00e1p su\u1ea5t n\u1ec1n t\u1ed1i thi\u1ec3u 10\u207b\u2075 Torr; t\u1ed1t h\u01a1n 10\u207b\u2076 Torr cho c\u00e1c \u1ee9ng d\u1ee5ng c\u00f4ng su\u1ea5t cao<\/strong> Gia nhi\u1ec7t \u0111\u1ebf:<\/li>\n\n\n\n
  • 100\u2013200\u00b0C trong qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng \u0111\u1ec3 b\u00e1m d\u00ednh<\/strong> Gi\u00e1m s\u00e1t \u0111\u1ed9 d\u00e0y:<\/li>\n\n\n\n
  • C\u00e2n vi l\u01b0\u1ee3ng tinh th\u1ec3 th\u1ea1ch anh v\u1edbi kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t l\u1edbp \u00b10,5 nm<\/strong> Dung l\u01b0\u1ee3ng l\u00f4:<\/li>\n\n\n\n
  • 50\u2013200 th\u1ea5u k\u00ednh m\u1ed7i l\u1ea7n ch\u1ea1y t\u00f9y thu\u1ed9c v\u00e0o k\u00edch th\u01b0\u1edbc th\u1ea5u k\u00ednh<\/strong> C\u00e1c \u1ee9ng d\u1ee5ng laser CO\u2082 c\u00f4ng su\u1ea5t cao (> 2 kW c\u00f4ng su\u1ea5t trung b\u00ecnh) y\u00eau c\u1ea7u \u0111\u00e1nh gi\u00e1 l\u1edbp ph\u1ee7 theo ng\u01b0\u1ee1ng h\u01b0 h\u1ecfng laser, th\u01b0\u1eddng theo ISO 21254. M\u1ed9t l\u1edbp ph\u1ee7 c\u00f3 \u0111\u1ed9 ph\u1ea3n x\u1ea1 danh \u0111\u1ecbnh 0,2% c\u00f3 c\u00e1c khuy\u1ebft t\u1eadt l\u1ed7 kim ho\u1eb7c b\u1ea5t th\u01b0\u1eddng h\u1ea5p th\u1ee5 c\u00f3 th\u1ec3 b\u1ecb h\u1ecfng th\u1ea3m kh\u1ed1c \u1edf m\u1eadt \u0111\u1ed9 c\u00f4ng su\u1ea5t m\u00e0 l\u1edbp ph\u1ee7 kh\u1ed1i c\u00f3 th\u1ec3 ch\u1ecbu \u0111\u01b0\u1ee3c.<\/li>\n<\/ul>\n\n\n\n

    Kh\u1edbp thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t quang h\u1ecdc laser CO\u2082 v\u1edbi quy m\u00f4 s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n

    \u0110\u1ea7u t\u01b0 v\u00e0 c\u1ea5u h\u00ecnh thi\u1ebft b\u1ecb ph\u1ee5 thu\u1ed9c v\u00e0o m\u1ee5c ti\u00eau kh\u1ed1i l\u01b0\u1ee3ng c\u1ee7a b\u1ea1n. Ba c\u1ea5u h\u00ecnh tham chi\u1ebfu:<\/h2>\n\n\n\n

    Kh\u1ed1i l\u01b0\u1ee3ng th\u1ea5p (< 200 th\u1ea5u k\u00ednh\/th\u00e1ng):<\/p>\n\n\n\n

    M\u00e1y c\u01b0a kim c\u01b0\u01a1ng \u0111\u01a1n x\u1eed l\u00fd t\u1ea5t c\u1ea3 vi\u1ec7c c\u1eaft ph\u00f4i<\/strong><\/p>\n\n\n\n

      \n
    • M\u1ed9t m\u00e1y m\u00e0i CNC v\u1edbi thay \u0111\u1ed5i b\u00e1nh m\u00e0i gi\u1eefa c\u00e1c giai \u0111o\u1ea1n th\u00f4 v\u00e0 ho\u00e0n thi\u1ec7n<\/li>\n\n\n\n
    • M\u1ed9t m\u00e1y \u0111\u00e1nh b\u00f3ng ch\u1ea1y c\u00e1c ch\u01b0\u01a1ng tr\u00ecnh m\u00e0i m\u00f2n tu\u1ea7n t\u1ef1<\/li>\n\n\n\n
    • Ph\u1ee7 ngo\u00e0i ho\u1eb7c m\u00e1y ph\u1ee7 l\u00f4 nh\u1ecf trong nh\u00e0<\/li>\n\n\n\n
    • Di\u1ec7n t\u00edch s\u00e0n \u01b0\u1edbc t\u00ednh: 40\u201360 m\u00b2<\/li>\n\n\n\n
    • Kh\u1ed1i l\u01b0\u1ee3ng trung b\u00ecnh (200\u20131.000 th\u1ea5u k\u00ednh\/th\u00e1ng):<\/li>\n<\/ul>\n\n\n\n

      M\u00e1y c\u1eaft chuy\u00ean d\u1ee5ng v\u1edbi \u0111i\u1ec1u khi\u1ec3n c\u0103ng servo<\/strong><\/p>\n\n\n\n

        \n
      • Hai m\u00e1y m\u00e0i (chuy\u00ean d\u1ee5ng cho th\u00f4 v\u00e0 ho\u00e0n thi\u1ec7n)<\/li>\n\n\n\n
      • Hai m\u00e1y \u0111\u00e1nh b\u00f3ng \u0111\u1ec3 x\u1eed l\u00fd song song<\/li>\n\n\n\n
      • M\u00e1y ph\u1ee7 trong nh\u00e0, dung l\u01b0\u1ee3ng 100+ th\u1ea5u k\u00ednh<\/li>\n\n\n\n
      • Di\u1ec7n t\u00edch s\u00e0n \u01b0\u1edbc t\u00ednh: 80\u2013120 m\u00b2<\/li>\n\n\n\n
      • Kh\u1ed1i l\u01b0\u1ee3ng cao (1.000+ th\u1ea5u k\u00ednh\/th\u00e1ng):<\/li>\n<\/ul>\n\n\n\n

        Nhi\u1ec1u m\u00e1y c\u1eaft v\u00e0 m\u00e1y m\u00e0i v\u1edbi chuy\u1ec3n giao robot<\/strong><\/p>\n\n\n\n

          \n
        • M\u00e1y \u0111\u00e1nh b\u00f3ng v\u1edbi \u0111i\u1ec1u khi\u1ec3n c\u00f4ng th\u1ee9c t\u1ef1 \u0111\u1ed9ng<\/li>\n\n\n\n
        • M\u00e1y ph\u1ee7 dung l\u01b0\u1ee3ng cao v\u1edbi nhi\u1ec1u ngu\u1ed3n l\u1eafng \u0111\u1ecdng<\/li>\n\n\n\n
        • \u0110o l\u01b0\u1eddng tr\u1ef1c tuy\u1ebfn \u0111\u1ec3 \u0111o b\u00e1n k\u00ednh v\u00e0 \u0111\u1ed9 d\u00e0y kh\u00f4ng ti\u1ebfp x\u00fac<\/li>\n\n\n\n
        • Di\u1ec7n t\u00edch s\u00e0n \u01b0\u1edbc t\u00ednh: 200+ m\u00b2<\/li>\n\n\n\n
        • S\u1ef1 chuy\u1ec3n \u0111\u1ed5i t\u1eeb kh\u1ed1i l\u01b0\u1ee3ng th\u1ea5p sang trung b\u00ecnh th\u01b0\u1eddng \u0111\u01b0\u1ee3c k\u00edch ho\u1ea1t khi \u0111\u00e1nh b\u00f3ng tr\u1edf th\u00e0nh n\u00fat th\u1eaft c\u1ed5 chai v\u1ec1 th\u00f4ng l\u01b0\u1ee3ng \u2014 m\u1ed9t m\u00e1y \u0111\u00e1nh b\u00f3ng c\u00f3 th\u1ec3 x\u1eed l\u00fd 50\u201380 th\u1ea5u k\u00ednh m\u1ed7i ca, v\u00e0 vi\u1ec7c th\u00eam m\u1ed9t m\u00e1y th\u1ee9 hai th\u01b0\u1eddng t\u0103ng g\u1ea5p \u0111\u00f4i th\u00f4ng l\u01b0\u1ee3ng m\u00e0 kh\u00f4ng y\u00eau c\u1ea7u thi\u1ebft b\u1ecb h\u1ed7 tr\u1ee3 b\u1ed5 sung.<\/li>\n<\/ul>\n\n\n\n

          Thi\u1ebft b\u1ecb ki\u1ec3m tra ch\u1ea5t l\u01b0\u1ee3ng.<\/p>\n\n\n\n

          \n