{"id":5025,"date":"2026-07-14T17:48:09","date_gmt":"2026-07-14T09:48:09","guid":{"rendered":"https:\/\/www.opticalcutting.com\/?p=5025"},"modified":"2026-09-21T13:54:40","modified_gmt":"2026-09-21T05:54:40","slug":"do-nham-be-mat-thau-kinh-germanium-ra-5nm","status":"publish","type":"post","link":"https:\/\/www.opticalcutting.com\/vi\/do-nham-be-mat-thau-kinh-germanium-ra-5nm\/","title":{"rendered":"\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5u k\u00ednh Germanium: Ra 5nm c\u00f3 ngh\u0129a l\u00e0 g\u00ec v\u00e0 l\u00e0m th\u1ebf n\u00e0o \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c n\u00f3"},"content":{"rendered":"

Ra 5 nm kh\u00f4ng ph\u1ea3i l\u00e0 m\u1ed9t con s\u1ed1 k\u1ef3 l\u1ea1 \u0111\u1ed1i v\u1edbi germanium. \u0110\u00f3 l\u00e0 m\u1ed9t c\u1ea5p \u0111\u1ed9 ho\u00e0n thi\u1ec7n m\u00e0 h\u00f3a ch\u1ea5t \u0111\u00e1nh b\u00f3ng \u0111\u00e3 \u0111\u01b0\u1ee3c thi\u1ebft l\u1eadp c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c m\u1ed9t c\u00e1ch th\u01b0\u1eddng xuy\u00ean \u2014 v\u00e0 m\u1ed9t quy tr\u00ecnh \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t k\u00e9m s\u1ebd kh\u00f4ng \u0111\u1ea1t \u0111\u01b0\u1ee3c d\u00f9 b\u1ea1n \u0111\u00e1nh b\u00f3ng bao l\u00e2u \u0111i n\u1eefa. L\u00fd do \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5u k\u00ednh gecmani<\/strong> \u0111\u01b0\u1ee3c quy \u0111\u1ecbnh ch\u1eb7t ch\u1ebd nh\u01b0 v\u1eady l\u00e0 do t\u00e1n x\u1ea1: trong d\u1ea3i nhi\u1ec7t 8\u201314 \u03bcm, k\u1ebft c\u1ea5u b\u1ec1 m\u1eb7t m\u00e0 m\u1eaft th\u01b0\u1eddng kh\u00f4ng nh\u00ecn th\u1ea5y \u0111\u01b0\u1ee3c trong quang h\u1ecdc \u00e1nh s\u00e1ng nh\u00ecn th\u1ea5y s\u1ebd tr\u1edf th\u00e0nh m\u1ed9t c\u01a1 ch\u1ebf suy hao c\u00f3 th\u1ec3 \u0111o l\u01b0\u1eddng \u0111\u01b0\u1ee3c.<\/p>\n\n\n\n

H\u01b0\u1edbng d\u1eabn n\u00e0y bao g\u1ed3m \u00fd ngh\u0129a c\u1ee7a c\u1ea5p \u0111\u1ed9 Ra 5 nm theo c\u00e1c thu\u1eadt ng\u1eef v\u1eadt l\u00fd, c\u00e1ch \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5u k\u00ednh gecmani<\/strong> \u0111\u01b0\u1ee3c \u0111i\u1ec1u khi\u1ec3n b\u1edfi m\u1ecdi giai \u0111o\u1ea1n k\u1ec3 t\u1eeb khi c\u1eaft b\u1eb1ng c\u01b0a d\u00e2y, c\u00e1ch \u0111o v\u00e0 ghi v\u00e0o b\u1ea3n v\u1ebd, v\u00e0 ba ch\u1ebf \u0111\u1ed9 l\u1ed7i khi\u1ebfn c\u00e1c x\u01b0\u1edfng kh\u00f4ng \u0111\u1ea1t \u0111\u01b0\u1ee3c n\u00f3.<\/p>\n\n\n\n

\"\u0111\u1ed9
Loop-type diamond wire saw for graphite,optical glass and so on.<\/figcaption><\/figure>\n\n\n\n

T\u1ea1i sao \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5u k\u00ednh Germanium l\u1ea1i quan tr\u1ecdng trong d\u1ea3i LWIR<\/h2>\n\n\n\n

Quang h\u1ecdc \u00e1nh s\u00e1ng nh\u00ecn th\u1ea5y ch\u1ecbu \u0111\u01b0\u1ee3c k\u1ebft c\u1ea5u b\u1ec1 m\u1eb7t nhi\u1ec1u h\u01a1n m\u1ecdi ng\u01b0\u1eddi mong \u0111\u1ee3i, b\u1edfi v\u00ec \u1edf b\u01b0\u1edbc s\u00f3ng 0,4\u20130,7 \u03bcm, h\u1ea7u h\u1ebft c\u00e1c v\u1ebft \u0111\u00e1nh b\u00f3ng \u0111\u00e3 \u1edf d\u01b0\u1edbi b\u01b0\u1edbc s\u00f3ng. \u1ede b\u01b0\u1edbc s\u00f3ng 8\u201314 \u03bcm, n\u01a1i germanium l\u00e0 v\u1eadt li\u1ec7u th\u1ea5u k\u00ednh ch\u1ee7 l\u1ef1c, m\u1ed1i quan h\u1ec7 gi\u1eefa b\u01b0\u1edbc s\u00f3ng v\u00e0 k\u1ebft c\u1ea5u thay \u0111\u1ed5i \u2014 v\u00e0 kh\u00f4ng theo h\u01b0\u1edbng m\u00e0 tr\u1ef1c gi\u00e1c g\u1ee3i \u00fd. B\u01b0\u1edbc s\u00f3ng d\u00e0i h\u01a1n kh\u00f4ng l\u00e0m cho \u0111\u1ed9 nh\u00e1m tr\u1edf n\u00ean kh\u00f4ng li\u00ean quan; n\u00f3 thay \u0111\u1ed5i t\u1ea7n s\u1ed1 kh\u00f4ng gian n\u00e0o g\u00e2y t\u00e1n x\u1ea1 v\u00e0 suy hao \u0111\u01b0\u1ee3c ph\u00e2n b\u1ed5 nh\u01b0 th\u1ebf n\u00e0o.<\/p>\n\n\n\n

T\u1ed5ng t\u00e1n x\u1ea1 t\u00edch h\u1ee3p t\u1eeb m\u1ed9t b\u1ec1 m\u1eb7t nh\u1eb5n tu\u00e2n theo m\u1ed1i quan h\u1ec7 Rayleigh-Rice, TIS \u2248 (4\u03c0\u03c3\/\u03bb)\u00b2<\/strong>, trong \u0111\u00f3 \u03c3 l\u00e0 RMS<\/em> \u0111\u1ed9 nh\u00e1m. S\u1ef1 kh\u00e1c bi\u1ec7t \u0111\u00f3 l\u00e0 n\u01a1i h\u1ea7u h\u1ebft c\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt g\u1eb7p sai l\u1ea7m: \u03c3 l\u00e0 Rq, kh\u00f4ng ph\u1ea3i Ra. \u0110\u1ed1i v\u1edbi b\u1ec1 m\u1eb7t c\u00f3 ph\u00e2n b\u1ed1 chi\u1ec1u cao Gaussian, Ra x\u1ea5p x\u1ec9 0,8 \u00d7 Rq, v\u00ec v\u1eady th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt \u0111\u01b0\u1ee3c ghi b\u1eb1ng Ra ph\u1ea3i \u0111\u01b0\u1ee3c chuy\u1ec3n \u0111\u1ed5i tr\u01b0\u1edbc khi \u0111\u01b0a v\u00e0o ng\u00e2n s\u00e1ch t\u00e1n x\u1ea1. Thay c\u00e1c s\u1ed1 v\u00e0o v\u1edbi \u03bb = 10 \u03bcm v\u00e0 h\u00ecnh d\u1ea1ng c\u1ee7a v\u1ea5n \u0111\u1ec1 s\u1ebd r\u00f5 r\u00e0ng \u2014 \u03c3 = 5 nm cho TIS d\u01b0\u1edbi 0,01% m\u1ed7i b\u1ec1 m\u1eb7t, trong khi \u03c3 = 50 nm cho kho\u1ea3ng 0,4%. Nh\u1ecf v\u1ec1 m\u1eb7t tuy\u1ec7t \u0111\u1ed1i, nh\u01b0ng quy\u1ebft \u0111\u1ecbnh trong m\u1ed9t h\u1ec7 th\u1ed1ng m\u00e0 bi\u00ean \u0111\u1ed9 t\u00edn hi\u1ec7u tr\u00ean nhi\u1ec5u l\u00e0 y\u1ebfu t\u1ed1 h\u1ea1n ch\u1ebf.<\/p>\n\n\n\n

Hai hi\u1ec7u \u1ee9ng kh\u00e1c c\u00f9ng t\u1ed3n t\u1ea1i v\u1edbi c\u00f9ng m\u1ed9t tham s\u1ed1:<\/p>\n\n\n\n

Ng\u01b0\u1ee1ng h\u01b0 h\u1ecfng do laser.<\/strong> Trong c\u00e1c h\u1ec7 th\u1ed1ng laser CO\u2082 s\u1eed d\u1ee5ng quang h\u1ecdc th\u1ee5 \u0111\u1ed9ng b\u1eb1ng germanium, c\u00e1c \u0111\u1ec9nh b\u1ec1 m\u1eb7t t\u1eadp trung c\u01b0\u1eddng \u0111\u1ed9 tr\u01b0\u1eddng, v\u00e0 m\u1ed7i \u0111\u1ec9nh l\u00e0 m\u1ed9t v\u1ecb tr\u00ed kh\u1edfi ph\u00e1t ti\u1ec1m n\u0103ng. C\u01a1 ch\u1ebf n\u00e0y \u0111\u00e3 \u0111\u01b0\u1ee3c thi\u1ebft l\u1eadp t\u1ed1t ngay c\u1ea3 khi c\u00e1c con s\u1ed1 mang t\u00ednh \u1ee9ng d\u1ee5ng c\u1ee5 th\u1ec3: b\u1ec1 m\u1eb7t nh\u00e1m h\u01a1n s\u1ebd h\u1ecfng \u1edf m\u1ee9c n\u0103ng l\u01b0\u1ee3ng th\u1ea5p h\u01a1n so v\u1edbi b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng t\u1ed1t c\u00f9ng v\u1eadt li\u1ec7u v\u00e0 l\u1edbp ph\u1ee7. N\u1ebfu ng\u01b0\u1ee1ng h\u01b0 h\u1ecfng l\u00e0 m\u1ed9t ph\u1ea7n th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt c\u1ee7a b\u1ea1n, n\u00f3 ph\u1ea3i \u0111\u01b0\u1ee3c x\u00e1c \u0111\u1ecbnh tr\u00ean c\u00e1c b\u1ed9 ph\u1eadn v\u00e0 l\u1edbp ph\u1ee7 c\u1ee7a ri\u00eang b\u1ea1n \u2014 m\u1ed9t con s\u1ed1 \u0111\u1ed9 nh\u00e1m \u0111\u01a1n l\u1ebb kh\u00f4ng d\u1ef1 \u0111o\u00e1n \u0111\u01b0\u1ee3c n\u00f3.<\/p>\n\n\n\n

S\u1ef1 ph\u00f9 h\u1ee3p c\u1ee7a l\u1edbp ph\u1ee7 AR.<\/strong> Quang h\u1ecdc germanium cho ch\u1ee5p \u1ea3nh nhi\u1ec7t h\u1ea7u nh\u01b0 lu\u00f4n \u0111\u01b0\u1ee3c ph\u1ee7 AR cho d\u1ea3i 8\u201312 \u03bcm, th\u01b0\u1eddng l\u00e0 m\u1ed9t ch\u1ed3ng nhi\u1ec1u l\u1edbp v\u1edbi ZnS\/Ge ho\u1eb7c DLC \u1edf ngo\u00e0i c\u00f9ng. L\u1edbp ph\u1ee7 ph\u00f9 h\u1ee3p v\u1edbi \u0111\u1ebf, v\u00ec v\u1eady k\u1ebft c\u1ea5u \u0111\u1ebf chuy\u1ec3n th\u00e0nh bi\u1ebfn thi\u00ean \u0111\u1ed9 d\u00e0y l\u1edbp ph\u1ee7 v\u00e0 bi\u1ebfn thi\u00ean \u0111\u1ed9 d\u00e0i \u0111\u01b0\u1eddng \u0111i quang h\u1ecdc tr\u00ean kh\u1ea9u \u0111\u1ed9 r\u00f5. Vi\u1ec7c ph\u1ee7 m\u1ed9t \u0111\u1ebf nh\u00e1m kh\u00f4ng l\u00e0m n\u00f3 nh\u1eb5n \u2014 n\u00f3 sao ch\u00e9p l\u1ea1i.<\/p>\n\n\n\n

Ra 5 nm Th\u1ef1c s\u1ef1 c\u00f3 ngh\u0129a l\u00e0 g\u00ec?<\/h2>\n\n\n\n

Ra l\u00e0 gi\u00e1 tr\u1ecb trung b\u00ecnh s\u1ed1 h\u1ecdc c\u1ee7a c\u00e1c \u0111\u1ed9 l\u1ec7ch bi\u00ean d\u1ea1ng tuy\u1ec7t \u0111\u1ed1i so v\u1edbi \u0111\u01b0\u1eddng trung b\u00ecnh, tr\u00ean m\u1ed9t \u0111\u1ed9 d\u00e0i l\u1ea5y m\u1eabu x\u00e1c \u0111\u1ecbnh. \u1ede Ra 5 nm, \u0111\u1ed9 l\u1ec7ch trung b\u00ecnh l\u00e0 n\u0103m nanomet \u2014 kho\u1ea3ng 1\/2000 \u0111\u01b0\u1eddng k\u00ednh s\u1ee3i t\u00f3c ng\u01b0\u1eddi v\u00e0 kho\u1ea3ng 1\/80 b\u01b0\u1edbc s\u00f3ng \u00e1nh s\u00e1ng xanh.<\/p>\n\n\n\n

Tuy nhi\u00ean, con s\u1ed1 n\u00e0y t\u1ef1 n\u00f3 g\u1ea7n nh\u01b0 v\u00f4 ngh\u0129a, v\u00e0 \u0111\u00f3 l\u00e0 ph\u1ea7n \u0111\u00e1ng \u0111\u1ec3 ghi nh\u1edb. Ra l\u00e0 m\u1ed9t gi\u00e1 tr\u1ecb trung b\u00ecnh, v\u00ec v\u1eady n\u00f3 che gi\u1ea5u ch\u00ednh x\u00e1c c\u00e1c khuy\u1ebft t\u1eadt l\u00e0m h\u1ecfng quang h\u1ecdc IR: m\u1ed9t v\u1ebft x\u01b0\u1edbc s\u00e2u duy nh\u1ea5t, m\u1ed9t m\u1ea3ng b\u1ec1 m\u1eb7t s\u1ea7n s\u00f9i, m\u1ed9t v\u00f9ng b\u1ecb r\u1ed7 do h\u01b0 h\u1ecfng d\u01b0\u1edbi b\u1ec1 m\u1eb7t b\u1ecb l\u1ed9 ra. Hai b\u1ec1 m\u1eb7t germanium c\u00f3 th\u1ec3 cho c\u00f9ng m\u1ed9t gi\u00e1 tr\u1ecb Ra v\u00e0 ho\u1ea1t \u0111\u1ed9ng ho\u00e0n to\u00e0n kh\u00e1c nhau trong m\u00e1y ch\u1ee5p \u1ea3nh nhi\u1ec7t. \u0110\u00e2y l\u00e0 l\u00fd do t\u1ea1i sao b\u1ea3n \u0111\u1ed3 \u0111\u1ecba h\u00ecnh \u0111\u1ea7y \u0111\u1ee7 quan tr\u1ecdng h\u01a1n m\u1ed9t gi\u00e1 tr\u1ecb \u0111\u1ecdc \u0111\u01a1n l\u1ebb, v\u00e0 t\u1ea1i sao c\u00e1c \u0111i\u1ec1u ki\u1ec7n l\u1ea5y m\u1eabu ph\u1ea3i \u0111i k\u00e8m v\u1edbi th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt.<\/p>\n\n\n\n

Do \u0111\u00f3, vi\u1ec7c \u0111\u1ea1t \u0111\u01b0\u1ee3c c\u1ea5p \u0111\u1ed9 Ra 5 nm kh\u00f4ng ph\u1ea3i l\u00e0 v\u1ea5n \u0111\u1ec1 \u0111\u00e1nh b\u00f3ng. \u0110\u00f3 l\u00e0 v\u1ea5n \u0111\u1ec1 c\u1ee7a to\u00e0n b\u1ed9 quy tr\u00ecnh \u2014 b\u01b0\u1edbc \u0111\u00e1nh b\u00f3ng ch\u1ec9 c\u00f3 th\u1ec3 lo\u1ea1i b\u1ecf m\u1ed9t l\u01b0\u1ee3ng v\u1eadt li\u1ec7u nh\u1ea5t \u0111\u1ecbnh tr\u01b0\u1edbc khi n\u00f3 b\u1eaft \u0111\u1ea7u t\u1ea1o ra c\u00e1c khuy\u1ebft t\u1eadt c\u1ee7a ri\u00eang m\u00ecnh, v\u00e0 nh\u1eefng g\u00ec n\u00f3 ph\u1ea3i lo\u1ea1i b\u1ecf \u0111\u00e3 \u0111\u01b0\u1ee3c quy\u1ebft \u0111\u1ecbnh \u1edf c\u00e1c giai \u0111o\u1ea1n tr\u01b0\u1edbc \u0111\u00f3 t\u1ea1i m\u00e1y c\u01b0a v\u00e0 m\u00e1y m\u00e0i.<\/p>\n\n\n\n

T\u1eeb v\u1ebft c\u1eaft c\u01b0a \u0111\u1ebfn b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng<\/h2>\n\n\n\n

S\u1ea3n xu\u1ea5t th\u1ea5u k\u00ednh Germanium tu\u00e2n theo m\u1ed9t tr\u00ecnh t\u1ef1 c\u1ed1 \u0111\u1ecbnh \u2014 c\u1eaft ph\u00f4i, m\u00e0i, \u0111\u00e1nh b\u00f3ng \u2014 v\u00e0 m\u1ed7i giai \u0111o\u1ea1n \u0111\u1eb7t \u0111i\u1ec1u ki\u1ec7n \u0111\u1ea7u v\u00e0o cho giai \u0111o\u1ea1n ti\u1ebfp theo. \u0110\u1ed9 ho\u00e0n thi\u1ec7n cu\u1ed1i c\u00f9ng ch\u1ec9 c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c khi m\u1ecdi giai \u0111o\u1ea1n tr\u01b0\u1edbc \u0111\u00f3 \u0111\u00e3 cung c\u1ea5p nh\u1eefng g\u00ec giai \u0111o\u1ea1n ti\u1ebfp theo c\u1ea7n.<\/p>\n\n\n\n

Giai \u0111o\u1ea1n 1: C\u1eaft b\u1eb1ng c\u01b0a d\u00e2y<\/h3>\n\n\n\n

B\u1ec1 m\u1eb7t sau khi c\u1eaft l\u00e0 b\u1ec1 m\u1eb7t nh\u00e1m nh\u1ea5t c\u1ee7a b\u1ed9 ph\u1eadn, v\u00e0 n\u00f3 \u0111\u1eb7t gi\u1edbi h\u1ea1n tr\u00ean cho \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5u k\u00ednh gecmani<\/strong> m\u1ecdi th\u1ee9 ph\u00eda sau ph\u1ea3i h\u01b0\u1edbng t\u1edbi. K\u1ebft c\u1ea5u c\u1ee7a n\u00f3 \u0111\u01b0\u1ee3c x\u00e1c \u0111\u1ecbnh b\u1edfi k\u00edch th\u01b0\u1edbc h\u1ea1t m\u00e0i c\u1ee7a d\u00e2y, t\u1ed1c \u0111\u1ed9 tuy\u1ebfn t\u00ednh c\u1ee7a d\u00e2y, t\u1ed1c \u0111\u1ed9 ti\u1ebfn dao v\u00e0 vi\u1ec7c cung c\u1ea5p ch\u1ea5t l\u00e0m m\u00e1t. Tr\u00ean m\u00e1y d\u00e2y chuy\u1ec1n li\u00ean t\u1ee5c c\u1ee7a ch\u00fang t\u00f4i, d\u00e2y ch\u1ea1y v\u1edbi t\u1ed1c \u0111\u1ed9 l\u00ean t\u1edbi 52\u201361 m\/s t\u00f9y thu\u1ed9c v\u00e0o m\u1eabu m\u00e3, v\u1edbi l\u1ef1c c\u0103ng l\u00e0m vi\u1ec7c t\u01b0\u01a1ng \u1ee9ng v\u1edbi \u0111\u01b0\u1eddng k\u00ednh d\u00e2y \u2014 80 N tr\u00ean v\u00f2ng d\u00e2y \u00d80,35 mm, 170 N tr\u00ean \u00d80,8\u20131,0 mm \u2014 v\u00e0 \u0111\u01b0\u1ee3c gi\u1eef t\u1ef1 \u0111\u1ed9ng trong qu\u00e1 tr\u00ecnh c\u1eaft. T\u1ed1c \u0111\u1ed9 ti\u1ebfn dao m\u1ea1nh v\u00e0 d\u00e2y b\u1ecb m\u00f2n \u0111\u1ec1u l\u00e0m cho k\u1ebft c\u1ea5u sau khi c\u1eaft tr\u1edf n\u00ean nh\u00e1m h\u01a1n, \u0111i\u1ec1u n\u00e0y l\u00e0m t\u0103ng g\u00e1nh n\u1eb7ng m\u00e0i v\u00e0 k\u00e9o d\u00e0i t\u1ed5ng th\u1eddi gian x\u1eed l\u00fd.<\/p>\n\n\n\n

V\u1ebft c\u1eaft c\u0169ng \u0111\u1ec3 l\u1ea1i m\u1ed9t l\u1edbp h\u01b0 h\u1ecfng d\u01b0\u1edbi b\u1ec1 m\u1eb7t<\/a> \u2014 tinh th\u1ec3 b\u1ecb x\u00e1o tr\u1ed9n b\u00ean d\u01b0\u1edbi m\u1ed9t b\u1ec1 m\u1eb7t tr\u00f4ng c\u00f3 v\u1ebb s\u1ea1ch. L\u1edbp \u0111\u00f3 ph\u1ea3i \u0111\u01b0\u1ee3c lo\u1ea1i b\u1ecf ho\u00e0n to\u00e0n trong qu\u00e1 tr\u00ecnh m\u00e0i. N\u1ebfu kh\u00f4ng, vi\u1ec7c \u0111\u00e1nh b\u00f3ng s\u1ebd l\u00e0m m\u1ecfng b\u1ec1 m\u1eb7t cho \u0111\u1ebfn khi m\u1eb7t ph\u1eb3ng h\u01b0 h\u1ecfng b\u1ecb l\u1ed9 ra, v\u00e0 n\u00f3 s\u1ebd xu\u1ea5t hi\u1ec7n d\u01b0\u1edbi d\u1ea1ng t\u00e1n x\u1ea1 b\u1ea5t th\u01b0\u1eddng v\u00e0 gi\u1ea3m truy\u1ec1n qua trong m\u1ed9t th\u1ea5u k\u00ednh ho\u00e0n ch\u1ec9nh. \u0110\u1ed9 s\u00e2u c\u1ee7a n\u00f3 ph\u1ee5 thu\u1ed9c v\u00e0o th\u1ecfi, t\u00ecnh tr\u1ea1ng d\u00e2y v\u00e0 t\u1ed1c \u0111\u1ed9 ti\u1ebfn dao, v\u00ec v\u1eady n\u00f3 \u0111\u01b0\u1ee3c x\u00e1c \u0111\u1ecbnh b\u1eb1ng th\u1eed nghi\u1ec7m ph\u00e1 h\u1ee7y tr\u00ean v\u1eadt li\u1ec7u th\u1ef1c t\u1ebf thay v\u00ec \u0111\u1ecdc t\u1eeb b\u1ea3ng.<\/p>\n\n\n\n

Giai \u0111o\u1ea1n 2: M\u00e0i<\/h3>\n\n\n\n

M\u00e0i l\u00e0 n\u01a1i \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5u k\u00ednh gecmani<\/strong> th\u1ef1c s\u1ef1 \u0111\u01b0\u1ee3c t\u1ea1o ra ho\u1eb7c m\u1ea5t \u0111i. N\u00f3 th\u1ef1c hi\u1ec7n hai nhi\u1ec7m v\u1ee5 c\u00f9ng m\u1ed9t l\u00fac: n\u00f3 lo\u1ea1i b\u1ecf l\u1edbp h\u01b0 h\u1ecfng do c\u1eaft, v\u00e0 n\u00f3 t\u1ea1o ra h\u00ecnh h\u1ecdc quang h\u1ecdc \u2014 b\u00e1n k\u00ednh cong tr\u00ean th\u1ea5u k\u00ednh, \u0111\u1ed9 ph\u1eb3ng tr\u00ean k\u00ednh c\u1eeda s\u1ed5. \u0110\u1ed1i v\u1edbi germanium, quy tr\u00ecnh th\u00f4ng th\u01b0\u1eddng l\u00e0 m\u1ed9t chu\u1ed7i c\u00e1c d\u1ee5ng c\u1ee5 vi\u00ean kim c\u01b0\u01a1ng g\u1eafn li\u1ec1n v\u1edbi c\u00e1c c\u1ee1 h\u1ea1t gi\u1ea3m d\u1ea7n:<\/p>\n\n\n\n

Giai \u0111o\u1ea1n<\/th>H\u1ea1t kim c\u01b0\u01a1ng \u0111i\u1ec3n h\u00ecnh<\/th>M\u1ee5c \u0111\u00edch c\u1ee7a giai \u0111o\u1ea1n n\u00e0y<\/th><\/tr><\/thead>
M\u00e0i th\u00f4<\/td>40\u201360 \u03bcm<\/td>Lo\u1ea1i b\u1ecf kh\u1ed1i l\u01b0\u1ee3ng l\u1edbn \u2014 lo\u1ea1i b\u1ecf k\u1ebft c\u1ea5u v\u1ebft c\u1eaft v\u00e0 h\u01b0 h\u1ecfng b\u00ean d\u01b0\u1edbi n\u00f3<\/td><\/tr>
M\u00e0i trung b\u00ecnh<\/td>15\u201325 \u03bcm<\/td>Thi\u1ebft l\u1eadp h\u00ecnh h\u1ecdc; lo\u1ea1i b\u1ecf h\u01b0 h\u1ecfng m\u00e0i th\u00f4<\/td><\/tr>
M\u00e0i tinh<\/td>6\u20139 \u03bcm<\/td>\u0110\u01b0a b\u1ec1 m\u1eb7t v\u00e0o ph\u1ea1m vi cho c\u00f4ng \u0111o\u1ea1n \u0111\u00e1nh b\u00f3ng<\/td><\/tr>
\u0110\u00e1 m\u00e0i ti\u1ec1n \u0111\u00e1nh b\u00f3ng<\/td>1\u20133 \u03bcm<\/td>\u0110\u1ec3 l\u1ea1i cho m\u00e1y \u0111\u00e1nh b\u00f3ng m\u1ed9t b\u1ec1 m\u1eb7t m\u00e0 n\u00f3 c\u00f3 th\u1ec3 ho\u00e0n thi\u1ec7n m\u00e0 kh\u00f4ng c\u1ea7n lo\u1ea1i b\u1ecf qu\u00e1 nhi\u1ec1u<\/td><\/tr><\/tbody><\/table>
Chu\u1ed7i h\u1ea1t m\u00e0i cho germanium. M\u1ed7i giai \u0111o\u1ea1n ph\u1ea3i lo\u1ea1i b\u1ecf nhi\u1ec1u h\u01a1n \u0111\u1ed9 s\u00e2u h\u01b0 h\u1ecfng c\u00f2n l\u1ea1i t\u1eeb giai \u0111o\u1ea1n tr\u01b0\u1edbc \u0111\u00f3.<\/figcaption><\/figure>\n\n\n\n

D\u00f2ng cu\u1ed1i c\u00f9ng trong b\u1ea3ng l\u00e0 quy t\u1eafc chi ph\u1ed1i to\u00e0n b\u1ed9 tr\u00ecnh t\u1ef1, v\u00e0 \u0111\u00f3 l\u00e0 n\u01a1i ph\u00e1t sinh h\u1ea7u h\u1ebft c\u00e1c v\u1ea5n \u0111\u1ec1 v\u1ec1 n\u0103ng su\u1ea5t. S\u1ef1 chuy\u1ec3n \u0111\u1ed5i t\u1eeb m\u00e0i tinh sang \u0111\u00e1nh b\u00f3ng l\u00e0 \u0111i\u1ec3m ki\u1ec3m tra t\u1ef1 nhi\u00ean: c\u00e1c \u0111i\u1ec3m cao c\u1ee5c b\u1ed9 ho\u1eb7c m\u1ed9t m\u1eabu kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u sau khi m\u00e0i tinh c\u00f3 ngh\u0129a l\u00e0 h\u01b0 h\u1ecfng t\u1eeb qu\u00e1 tr\u00ecnh c\u1eaft v\u1eabn c\u00f2n v\u00e0 c\u1ea7n lo\u1ea1i b\u1ecf nhi\u1ec1u v\u1eadt li\u1ec7u h\u01a1n tr\u01b0\u1edbc khi b\u1eaft \u0111\u1ea7u \u0111\u00e1nh b\u00f3ng.<\/p>\n\n\n\n

Our m\u00e1y m\u00e0i quang h\u1ecdc h\u1ed3ng ngo\u1ea1i<\/a> ch\u1ea1y germanium v\u1edbi t\u1ed1c \u0111\u1ed9 lo\u1ea1i b\u1ecf \u0111\u01b0\u1ee3c \u0111\u1eb7t cho s\u1ef1 k\u1ebft h\u1ee3p \u0111\u1eb7c bi\u1ec7t gi\u1eefa \u0111\u1ed9 c\u1ee9ng v\u00e0 \u0111\u1ed9 gi\u00f2n c\u1ee7a germanium, thay v\u00ec \u00e1p d\u1ee5ng c\u00e1c tham s\u1ed1 th\u1ee7y tinh cho v\u1eadt li\u1ec7u d\u1ec5 v\u1ee1 h\u01a1n. thi\u1ebft b\u1ecb m\u00e0i th\u1ea5u k\u00ednh germanium<\/a> t\u1ed5ng quan bao g\u1ed3m c\u00e1c t\u00f9y ch\u1ecdn m\u00e1y cho giai \u0111o\u1ea1n n\u00e0y.<\/p>\n\n\n\n

Giai \u0111o\u1ea1n 3: \u0110\u00e1nh b\u00f3ng<\/h3>\n\n\n\n

Germanium \u0111\u00e1nh b\u00f3ng hi\u1ec7u qu\u1ea3 so v\u1edbi sapphire ho\u1eb7c silicon carbide, v\u00ec v\u1eady \u0111\u00e1nh b\u00f3ng hi\u1ebfm khi l\u00e0 n\u00fat th\u1eaft c\u1ed5 chai \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c m\u1ed9t \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5u k\u00ednh gecmani<\/strong>. Kh\u00f3 kh\u0103n kh\u00f4ng ph\u1ea3i l\u00e0 lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u \u2014 m\u00e0 l\u00e0 lo\u1ea1i b\u1ecf n\u00f3 \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean to\u00e0n b\u1ed9 kh\u1ea9u \u0111\u1ed9 m\u00e0 kh\u00f4ng g\u00e2y ra c\u00e1c khuy\u1ebft t\u1eadt m\u1edbi.<\/p>\n\n\n\n

H\u00f3a h\u1ecdc \u0111\u00e1nh b\u00f3ng l\u00e0 th\u00f4ng th\u01b0\u1eddng: huy\u1ec1n ph\u00f9 silica d\u1ea1ng keo ho\u1eb7c oxit ceri m\u1ecbn tr\u00ean \u0111\u00e1 \u0111\u00e1nh b\u00f3ng polyurethane ho\u1eb7c pitch. \u0110o l\u01b0\u1eddng cu\u1ed1i c\u00f9ng n\u00ean \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n \u1edf nhi\u1ec1u v\u1ecb tr\u00ed tr\u00ean kh\u1ea9u \u0111\u1ed9 \u2014 t\u00e2m, b\u00e1n k\u00ednh gi\u1eefa v\u00e0 g\u1ea7n r\u00eca \u2014 v\u00ec dn\/dT c\u1ee7a germanium cho ph\u00e9p nhi\u1ec7t \u0111\u1ed9 c\u1ee5c b\u1ed9 thay \u0111\u1ed5i t\u1ed1c \u0111\u1ed9 lo\u1ea1i b\u1ecf, \u0111i\u1ec1u n\u00e0y c\u00f3 th\u1ec3 \u0111\u1ec3 l\u1ea1i m\u1ed9t \u0111\u1ed9 d\u1ed1c t\u1eeb t\u00e2m \u0111\u1ebfn r\u00eca tr\u00ean c\u00e1c kh\u1ea9u \u0111\u1ed9 l\u1edbn h\u01a1n m\u00e0 m\u1ed9t l\u1ea7n \u0111\u1ecdc \u1edf t\u00e2m duy nh\u1ea5t s\u1ebd kh\u00f4ng bao gi\u1edd cho th\u1ea5y. Trang m\u00e1y \u0111\u00e1nh b\u00f3ng quang h\u1ecdc germanium<\/a> c\u1ee7a ch\u00fang t\u00f4i bao g\u1ed3m kh\u00eda c\u1ea1nh thi\u1ebft b\u1ecb.<\/p>\n\n\n\n

Ba Ch\u1ebf \u0111\u1ed9 L\u1ed7i Ng\u0103n B\u1ea1n \u0110\u1ea1t \u0110\u01b0\u1ee3c Ra 5 nm<\/h2>\n\n\n\n

M\u1ed7i ch\u1ebf \u0111\u1ed9 trong ba ch\u1ebf \u0111\u1ed9 n\u00e0y t\u1ea1o ra m\u1ed9t b\u1ec1 m\u1eb7t b\u1ecb l\u1ed7i v\u00ec \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5u k\u00ednh gecmani<\/strong> m\u1ed9t l\u00fd do kh\u00e1c nhau, v\u00e0 m\u1ed7i ch\u1ebf \u0111\u1ed9 c\u00f3 m\u1ed9t c\u00e1ch kh\u1eafc ph\u1ee5c kh\u00e1c nhau.<\/p>\n\n\n\n

V\u1ecf cam.<\/strong> C\u00e1c g\u1edd n\u00f4ng, g\u1ea7n nhau ph\u00e1t tri\u1ec3n khi t\u1ed1c \u0111\u1ed9 lo\u1ea1i b\u1ecf \u0111\u00e1nh b\u00f3ng v\u01b0\u1ee3t qu\u00e1 t\u1ed1c \u0111\u1ed9 th\u01b0 gi\u00e3n b\u1ec1 m\u1eb7t. C\u00f3 th\u1ec3 nh\u00ecn th\u1ea5y d\u01b0\u1edbi \u00e1nh s\u00e1ng xi\u00ean v\u00e0 ph\u00e1t hi\u1ec7n b\u1eb1ng giao thoa k\u1ebf. N\u00f3 xu\u1ea5t hi\u1ec7n khi \u00e1p su\u1ea5t \u0111\u00e1nh b\u00f3ng qu\u00e1 cao so v\u1edbi h\u1ee3p ch\u1ea5t \u0111ang s\u1eed d\u1ee5ng, ho\u1eb7c khi \u0111\u00e1 \u0111\u00e1nh b\u00f3ng b\u1ecb n\u00f3ng trong qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng k\u00e9o d\u00e0i. M\u1ed9t khi n\u00f3 ph\u00e1t tri\u1ec3n, \u0111\u00e1nh b\u00f3ng s\u1ebd kh\u00f4ng l\u00e0m m\u1ecbn n\u00f3 \u2014 b\u1ed9 ph\u1eadn s\u1ebd quay tr\u1edf l\u1ea1i m\u00e0i tinh.<\/p>\n\n\n\n

Nhi\u1ec5m b\u1ea9n nh\u1ef1a th\u00f4ng.<\/strong> \u0110\u00e1 \u0111\u00e1nh b\u00f3ng pitch nh\u00fang c\u00e1c h\u1ea1t m\u00e0i \u0111\u01b0\u1ee3c mang t\u1eeb c\u00e1c giai \u0111o\u1ea1n m\u00e0i tr\u01b0\u1edbc \u0111\u00f3 khi quy tr\u00ecnh l\u00e0m s\u1ea1ch gi\u1eefa c\u00e1c giai \u0111o\u1ea1n b\u1ecb l\u1ecfng l\u1ebbo. C\u00e1c h\u1ea1t b\u1ecb nh\u00fang t\u1ea1o ra c\u00e1c v\u1ebft x\u01b0\u1edbc s\u00e2u ng\u1eabu nhi\u00ean, v\u00e0 m\u1ed9t v\u1ebft x\u01b0\u1edbc duy nh\u1ea5t s\u1ebd lo\u1ea1i b\u1ecf b\u1ec1 m\u1eb7t b\u1ea5t k\u1ec3 ch\u1ec9 s\u1ed1 Ra cho bi\u1ebft.<\/p>\n\n\n\n

H\u01b0 h\u1ecfng d\u01b0\u1edbi b\u1ec1 m\u1eb7t c\u00f2n s\u00f3t l\u1ea1i.<\/strong> N\u1ebfu qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng b\u1eaft \u0111\u1ea7u khi v\u1eabn c\u00f2n h\u01b0 h\u1ea1i, n\u00f3 s\u1ebd lo\u1ea1i b\u1ecf l\u1edbp b\u1ec1 m\u1eb7t v\u00e0 cu\u1ed1i c\u00f9ng l\u00e0m l\u1ed9 ra m\u1eb7t h\u01b0 h\u1ea1i \u2014 c\u00e1c v\u1ebft r\u1ed7 si\u00eau nh\u1ecf v\u00e0 \u0111\u1ecba h\u00ecnh b\u1ea5t th\u01b0\u1eddng d\u01b0\u1edbi k\u00ednh hi\u1ec3n vi giao thoa. Gi\u1ea3i ph\u00e1p lu\u00f4n l\u00e0 quay l\u1ea1i b\u01b0\u1edbc m\u00e0i, \u0111i\u1ec1u n\u00e0y t\u1ed1n k\u00e9m v\u00e0o th\u1eddi \u0111i\u1ec3m \u0111\u00f3. \u0110\u00e2y l\u00e0 l\u00fd do ph\u1ed5 bi\u1ebfn nh\u1ea5t khi\u1ebfn m\u1ed9t x\u01b0\u1edfng \u201c\u0111\u00e1nh b\u00f3ng \u0111\u00fang c\u00e1ch\u201d v\u1eabn kh\u00f4ng th\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ho\u00e0n thi\u1ec7n mong mu\u1ed1n.<\/p>\n\n\n\n

\"\u0111\u00e1nh
Loop-type diamond wire saw for graphite,optical glass and so on.<\/figcaption><\/figure>\n\n\n\n

Ra 5 nm n\u00ean \u0111\u01b0\u1ee3c \u0111o v\u00e0 quy \u0111\u1ecbnh nh\u01b0 th\u1ebf n\u00e0o?<\/h2>\n\n\n\n

\u1ede m\u1ee9c Ra 5 nm, \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t th\u1ea5u k\u00ednh gecmani<\/strong> c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c \u0111o \u0111\u00fang c\u00e1ch b\u1eb1ng hai k\u1ef9 thu\u1eadt. M\u1ed9t k\u1ef9 thu\u1eadt th\u1ee9 ba \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng ph\u1ed5 bi\u1ebfn th\u00ec ho\u00e0n to\u00e0n kh\u00f4ng ph\u00f9 h\u1ee3p.<\/p>\n\n\n\n

K\u00ednh hi\u1ec3n vi giao thoa \u00e1nh s\u00e1ng tr\u1eafng.<\/strong> Kh\u00f4ng ti\u1ebfp x\u00fac, nhanh ch\u00f3ng v\u00e0 tr\u1ea3 v\u1ec1 m\u1ed9t b\u1ea3n \u0111\u1ed3 \u0111\u1ecba h\u00ecnh \u0111\u1ea7y \u0111\u1ee7 thay v\u00ec m\u1ed9t con s\u1ed1 duy nh\u1ea5t \u2014 \u0111\u00e2y l\u00e0 th\u1ee9 ti\u1ebft l\u1ed9 hi\u1ec7n t\u01b0\u1ee3ng v\u1ecf cam, c\u00e1c v\u1ebft r\u1ed7 v\u00e0 v\u1ebft x\u01b0\u1edbc m\u00e0 gi\u00e1 tr\u1ecb Ra trung b\u00ecnh h\u00f3a \u0111i. L\u1ef1a ch\u1ecdn th\u00f4ng th\u01b0\u1eddng cho gi\u00e1m s\u00e1t s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n

K\u00ednh hi\u1ec3n vi l\u1ef1c nguy\u00ean t\u1eed.<\/strong> \u0110\u1ed9 ph\u00e2n gi\u1ea3i d\u1ecdc d\u01b0\u1edbi nanomet tr\u00ean m\u1ed9t tr\u01b0\u1eddng nh\u1ecf. Qu\u00e1 ch\u1eadm cho s\u1ea3n xu\u1ea5t, nh\u01b0ng x\u00e1c \u0111\u1ecbnh cho c\u00e1c ph\u00e9p \u0111o tham chi\u1ebfu v\u00e0 \u0111\u1ec3 gi\u1ea3i quy\u1ebft c\u00e1c k\u1ebft qu\u1ea3 giao thoa kh\u00f4ng r\u00f5 r\u00e0ng tr\u00ean c\u00e1c b\u1ed9 ph\u1eadn quan tr\u1ecdng.<\/p>\n\n\n\n

Ph\u01b0\u01a1ng ph\u00e1p \u0111o bi\u00ean d\u1ea1ng ti\u1ebfp x\u00fac kh\u00f4ng ph\u00f9 h\u1ee3p \u1edf \u0111\u00e2y.<\/strong> \u0110\u1ea7u d\u00f2 c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn h\u01a1n nhi\u1ec1u so v\u1edbi c\u00e1c \u0111\u1eb7c \u0111i\u1ec3m \u0111ang \u0111\u01b0\u1ee3c \u0111o, v\u00e0 vi\u1ec7c k\u00e9o n\u00f3 tr\u00ean v\u1eadt li\u1ec7u germanium m\u1ec1m c\u00f3 th\u1ec3 t\u1ea1o ra c\u00e1c v\u1ebft x\u01b0\u1edbc m\u00e0 b\u1ea1n \u0111ang ki\u1ec3m tra.<\/p>\n\n\n\n

\u0110i\u1ec3m quy \u0111\u1ecbnh quan tr\u1ecdng h\u01a1n l\u1ef1a ch\u1ecdn thi\u1ebft b\u1ecb. Theo ISO 10110-8<\/a>, k\u1ebft c\u1ea5u b\u1ec1 m\u1eb7t tr\u00ean b\u1ea3n v\u1ebd quang h\u1ecdc n\u00ean mang theo b\u0103ng th\u00f4ng \u0111o \u2014 gi\u1edbi h\u1ea1n t\u1ea7n s\u1ed1 kh\u00f4ng gian th\u1ea5p v\u00e0 cao \u2014 c\u00f9ng v\u1edbi gi\u00e1 tr\u1ecb. M\u1ed9t b\u1ed9 ph\u1eadn quang h\u1ecdc germanium \u0111\u01b0\u1ee3c quy \u0111\u1ecbnh l\u00e0 \u201cRa \u2264 5 nm\u201d m\u00e0 kh\u00f4ng c\u00f3 b\u0103ng th\u00f4ng l\u00e0 ch\u01b0a \u0111\u1ee7: c\u00f9ng m\u1ed9t b\u1ec1 m\u1eb7t c\u00f3 th\u1ec3 v\u01b0\u1ee3t qua tr\u00ean m\u1ed9t tr\u01b0\u1eddng m\u1eabu v\u00e0 th\u1ea5t b\u1ea1i tr\u00ean m\u1ed9t tr\u01b0\u1eddng kh\u00e1c, v\u00e0 kh\u00f4ng b\u00ean n\u00e0o sai. Ghi b\u0103ng th\u00f4ng v\u00e0o b\u1ea3n v\u1ebd l\u00e0 c\u00e1ch r\u1ebb nh\u1ea5t \u0111\u1ec3 tr\u00e1nh tranh ch\u1ea5p ch\u1ea5p nh\u1eadn.<\/p>\n\n\n\n

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