{"id":4894,"date":"2026-06-01T17:18:39","date_gmt":"2026-06-01T09:18:39","guid":{"rendered":"https:\/\/www.opticalcutting.com\/?p=4894"},"modified":"2026-06-01T17:18:39","modified_gmt":"2026-06-01T09:18:39","slug":"wafer-double-sided-lapping","status":"publish","type":"post","link":"https:\/\/www.opticalcutting.com\/vi\/wafer-double-sided-lapping\/","title":{"rendered":"M\u00e0i hai m\u1eb7t t\u1ea5m wafer Germanium: C\u00e1ch s\u1ea3n xu\u1ea5t c\u00e1c ph\u00f4i ph\u1eb3ng, song song cho quang h\u1ecdc IR ch\u00ednh x\u00e1c"},"content":{"rendered":"

Sau khi c\u1eaft b\u1eb1ng c\u01b0a d\u00e2y, m\u1ed9t t\u1ea5m germanium c\u00f3 hai v\u1ea5n \u0111\u1ec1: b\u1ec1 m\u1eb7t kh\u00f4ng \u0111\u1ee7 ph\u1eb3ng v\u00e0 kh\u00f4ng \u0111\u1ee7 song song. C\u1eaft d\u00e2y cho \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t Ra 0,6\u20131,2 \u03bcm v\u1edbi TTV (bi\u1ebfn thi\u00ean t\u1ed5ng \u0111\u1ed9 d\u00e0y) l\u00e0 8\u201315 \u03bcm tr\u00ean t\u1ea5m c\u00f3 \u0111\u01b0\u1eddng k\u00ednh \u03a650 mm. \u0110\u1ed1i v\u1edbi nhi\u1ec1u \u1ee9ng d\u1ee5ng quang h\u1ecdc h\u1ed3ng ngo\u1ea1i, \u0111i\u1ec1u \u0111\u00f3 l\u00e0 ch\u01b0a \u0111\u1ee7 t\u1ed1t \u0111\u1ec3 s\u1eed d\u1ee5ng tr\u1ef1c ti\u1ebfp m\u00e0i c\u1ea7u<\/a>.<\/p>\n\n\n\n

M\u00e0i hai m\u1eb7t t\u1ea5m wafer germanium gi\u1ea3i quy\u1ebft c\u1ea3 hai v\u1ea5n \u0111\u1ec1 trong m\u1ed9t quy tr\u00ecnh duy nh\u1ea5t \u2014 c\u1ea3i thi\u1ec7n \u0111\u1ed9 ph\u1eb3ng, \u0111\u1ed9 song song v\u00e0 t\u00ecnh tr\u1ea1ng b\u1ec1 m\u1eb7t \u0111\u1ed3ng th\u1eddi tr\u00ean c\u1ea3 hai m\u1eb7t c\u1ee7a t\u1ea5m.<\/p>\n\n\n\n

V\u1ecb tr\u00ed c\u1ee7a M\u00e0i Hai M\u1eb7t trong D\u00e2y chuy\u1ec1n S\u1ea3n xu\u1ea5t Germanium<\/h2>\n\n\n\n

M\u00e0i n\u1eb1m gi\u1eefa b\u01b0\u1edbc c\u1eaft\/c\u0103n t\u00e2m v\u00e0 m\u00e0i trong s\u1ea3n xu\u1ea5t quang h\u1ecdc h\u1ed3ng ngo\u1ea1i<\/a> quy tr\u00ecnh l\u00e0m vi\u1ec7c:<\/p>\n\n\n\n

Giai \u0111o\u1ea1n<\/th>Qu\u00e1 tr\u00ecnh<\/th>Thi\u1ebft b\u1ecb<\/th>Output<\/th><\/tr><\/thead>
1<\/td>C\u1eaft \u0111\u01b0\u1eddng vi\u1ec1n<\/td>C\u01b0a d\u00e2y (SGI 40)<\/td>Ph\u00f4i \u0111\u1ecbnh h\u00ecnh<\/td><\/tr>
2<\/td>C\u1eaft l\u00e1t<\/td>C\u01b0a d\u00e2y (SGI 40)<\/td>\u0110\u0129a ph\u1eb3ng, Ra 0,6\u20131,2 \u03bcm, TTV 8\u201315 \u03bcm<\/td><\/tr>
3<\/td>C\u0103n t\u00e2m + v\u00e1t c\u1ea1nh<\/td>M\u00e1y \u0111\u1ecbnh t\u00e2m (C-120L)<\/td>T\u1ea5m tr\u00f2n, \u0111\u1ed9 tr\u00f2n \u2264 5 \u03bcm<\/td><\/tr>
3.5<\/strong><\/td>M\u00e0i hai m\u1eb7t<\/strong><\/td>M\u00e1y m\u00e0i<\/strong><\/td>M\u1eb7t ph\u1eb3ng, Ra 0.2\u20130.4 \u03bcm, TTV < 5 \u03bcm<\/strong><\/td><\/tr>
4<\/td>M\u00e0i c\u1ea7u<\/td>M\u00e1y m\u00e0i (G-100\/G-250)<\/td>B\u1ec1 m\u1eb7t cong, Ra 0.1\u20130.3 \u03bcm<\/td><\/tr>
5<\/td>\u0110\u00e1nh b\u00f3ng + ph\u1ee7 AR<\/td>M\u00e1y \u0111\u00e1nh b\u00f3ng<\/td>Ra < 5 nm, th\u1ea5u k\u00ednh ho\u00e0n thi\u1ec7n<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

Kh\u00f4ng ph\u1ea3i m\u1ecdi th\u1ea5u k\u00ednh germanium \u0111\u1ec1u y\u00eau c\u1ea7u b\u01b0\u1edbc m\u00e0i chuy\u00ean d\u1ee5ng. \u0110\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng c\u00f3 y\u00eau c\u1ea7u \u0111\u1ed9 ph\u1eb3ng th\u1ea5p h\u01a1n (\u00b10.01 mm), ph\u00f4i c\u00f3 th\u1ec3 chuy\u1ec3n th\u1eb3ng t\u1eeb b\u01b0\u1edbc \u0111\u1ecbnh t\u00e2m sang m\u00e0i. Nh\u01b0ng \u0111\u1ed1i v\u1edbi c\u00e1c quang h\u1ecdc IR ch\u00ednh x\u00e1c \u2014 th\u1ea5u k\u00ednh \u1ea3nh nhi\u1ec7t, h\u1ec7 th\u1ed1ng FLIR, c\u1eeda s\u1ed5 quang ph\u1ed5 \u2014 m\u00e0i hai m\u1eb7t ph\u00f4i germanium l\u00e0 quy tr\u00ecnh \u0111\u1ea3m b\u1ea3o giai \u0111o\u1ea1n m\u00e0i b\u1eaft \u0111\u1ea7u t\u1eeb ph\u00f4i c\u00f3 h\u00ecnh d\u1ea1ng h\u00ecnh h\u1ecdc ch\u00ednh x\u00e1c.<\/p>\n\n\n\n

\"Vimfun
Loop-type diamond wire saw for graphite,optical glass and so on.<\/figcaption><\/figure>\n\n\n\n

T\u1ea1i sao Germanium C\u1ea7n M\u00e0i Hai M\u1eb7t<\/h2>\n\n\n\n

\u0110\u1eb7c t\u00ednh v\u1eadt li\u1ec7u g\u00e2y ra v\u1ea5n \u0111\u1ec1<\/h3>\n\n\n\n

Germanium (Ge) c\u00f3 c\u00e1c \u0111\u1eb7c t\u00ednh v\u1eadt li\u1ec7u \u0111\u1eb7c bi\u1ec7t khi\u1ebfn t\u00ecnh tr\u1ea1ng b\u1ec1 m\u1eb7t sau khi c\u1eaft t\u1ec7 h\u01a1n nhi\u1ec1u v\u1eadt li\u1ec7u quang h\u1ecdc kh\u00e1c:<\/p>\n\n\n\n

C\u1ea5u tr\u00fac tinh th\u1ec3.<\/strong> Germanium l\u00e0 m\u1ed9t ch\u1ea5t b\u00e1n d\u1eabn \u0111\u01a1n tinh th\u1ec3 v\u1edbi m\u1ea1ng l\u01b0\u1edbi l\u1eadp ph\u01b0\u01a1ng kim c\u01b0\u01a1ng. Vi\u1ec7c c\u1eaft b\u1eb1ng d\u00e2y c\u01b0a t\u1ea1o ra h\u01b0 h\u1ecfng d\u01b0\u1edbi b\u1ec1 m\u1eb7t \u2014 c\u00e1c v\u1ebft n\u1ee9t nh\u1ecf d\u1ecdc theo c\u00e1c m\u1eb7t ph\u1eb3ng tinh th\u1ec3 k\u00e9o d\u00e0i 5\u201315 \u03bcm d\u01b0\u1edbi b\u1ec1 m\u1eb7t nh\u00ecn th\u1ea5y \u0111\u01b0\u1ee3c. M\u00e0i lo\u1ea1i b\u1ecf l\u1edbp h\u01b0 h\u1ecfng n\u00e0y m\u1ed9t c\u00e1ch c\u00f3 ki\u1ec3m so\u00e1t.<\/p>\n\n\n\n

\u0110\u1ed9 m\u1ec1m.<\/strong> V\u1edbi \u0111\u1ed9 c\u1ee9ng Knoop kho\u1ea3ng 780 (so v\u1edbi 1.000+ \u0111\u1ed1i v\u1edbi h\u1ea7u h\u1ebft c\u00e1c lo\u1ea1i k\u00ednh quang h\u1ecdc), germanium t\u01b0\u01a1ng \u0111\u1ed1i m\u1ec1m. \u0110i\u1ec1u n\u00e0y l\u00e0m cho n\u00f3 ph\u1ea3n \u1ee9ng v\u1edbi qu\u00e1 tr\u00ecnh m\u00e0i nh\u01b0ng c\u0169ng d\u1ec5 b\u1ecb lo\u1ea1i b\u1ecf qu\u00e1 m\u1ee9c n\u1ebfu c\u00e1c th\u00f4ng s\u1ed1 quy tr\u00ecnh kh\u00f4ng \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t.<\/p>\n\n\n\n

Chi ph\u00ed v\u1eadt li\u1ec7u cao.<\/strong> Germanium c\u1ea5p quang h\u1ecdc c\u00f3 gi\u00e1 $1.800\u2013$2.400 m\u1ed7i kg. M\u1ed9t ph\u00f4i \u0111\u01b0\u1eddng k\u00ednh \u03a650 mm n\u1eb7ng kho\u1ea3ng 25\u201330 gram, l\u00e0m cho m\u1ed7i ph\u00f4i c\u00f3 gi\u00e1 tr\u1ecb $45\u2013$72 ch\u1ec9 ri\u00eang v\u1ec1 nguy\u00ean li\u1ec7u th\u00f4. M\u1ed7i micron v\u1eadt li\u1ec7u b\u1ecb lo\u1ea1i b\u1ecf kh\u00f4ng c\u1ea7n thi\u1ebft trong qu\u00e1 tr\u00ecnh m\u00e0i l\u00e0m gi\u1ea3m gi\u00e1 tr\u1ecb c\u00f3 s\u1eb5n cho th\u1ea5u k\u00ednh cu\u1ed1i c\u00f9ng. Theo Umicore Electro-Optic Materials<\/a>, germanium v\u1eabn l\u00e0 l\u1ef1a ch\u1ecdn h\u00e0ng \u0111\u1ea7u cho c\u00e1c b\u1ed9 ph\u1eadn quang h\u1ecdc ch\u1ee5p \u1ea3nh nhi\u1ec7t d\u1ea3i 8\u201314 \u03bcm \u2014 c\u00f3 ngh\u0129a l\u00e0 nhu c\u1ea7u v\u1ec1 c\u00e1c ph\u00f4i germanium \u0111\u01b0\u1ee3c x\u1eed l\u00fd ch\u00ednh x\u00e1c ti\u1ebfp t\u1ee5c t\u0103ng.<\/p>\n\n\n\n

Lapping \u0110\u1ea1t \u0110\u01b0\u1ee3c \u0110i\u1ec1u G\u00ec<\/h3>\n\n\n\n

Lapping hai m\u1eb7t t\u1ea5m wafer germanium \u0111\u1ea1t \u0111\u01b0\u1ee3c ba \u0111i\u1ec1u c\u00f9ng l\u00fac:<\/p>\n\n\n\n

    \n
  1. Hi\u1ec7u ch\u1ec9nh \u0111\u1ed9 ph\u1eb3ng<\/strong> \u2014 lo\u1ea1i b\u1ecf \u0111\u1ed9 cong v\u00e0 v\u00eanh c\u00f2n s\u00f3t l\u1ea1i t\u1eeb qu\u00e1 tr\u00ecnh c\u1eaft b\u1eb1ng c\u01b0a d\u00e2y, \u0111\u01b0a \u0111\u1ed9 ph\u1eb3ng b\u1ec1 m\u1eb7t t\u1eeb 10\u201320 \u03bcm xu\u1ed1ng d\u01b0\u1edbi < 3 \u03bcm tr\u00ean to\u00e0n b\u1ed9 ph\u00f4i<\/li>\n\n\n\n
  2. C\u1ea3i thi\u1ec7n \u0111\u1ed9 song song<\/strong> \u2014 \u0111\u1ea3m b\u1ea3o hai m\u1eb7t c\u00e1ch \u0111\u1ec1u nhau, gi\u1ea3m TTV t\u1eeb 8\u201315 \u03bcm (sau khi c\u1eaft) xu\u1ed1ng d\u01b0\u1edbi < 5 \u03bcm<\/li>\n\n\n\n
  3. Lo\u1ea1i b\u1ecf h\u01b0 h\u1ecfng d\u01b0\u1edbi b\u1ec1 m\u1eb7t<\/strong> \u2014 t\u00e1c \u0111\u1ed9ng c\u1ee7a lapping lo\u1ea1i b\u1ecf l\u1edbp vi n\u1ee9t do c\u1eaft b\u1eb1ng c\u01b0a d\u00e2y, t\u1ea1o ra b\u1ec1 m\u1eb7t s\u1ea1ch cho qu\u00e1 tr\u00ecnh m\u00e0i<\/li>\n<\/ol>\n\n\n\n

    C\u00e1ch Lapping Hai M\u1eb7t T\u1ea5m Wafer Germanium Ho\u1ea1t \u0110\u1ed9ng<\/h2>\n\n\n\n

    Nguy\u00ean L\u00fd Quy Tr\u00ecnh<\/h3>\n\n\n\n

    Trong qu\u00e1 tr\u00ecnh lapping hai m\u1eb7t, ph\u00f4i germanium \u0111\u01b0\u1ee3c \u0111\u1eb7t trong m\u1ed9t b\u1ed9 g\u00e1 (th\u01b0\u1eddng l\u00e0 m\u1ed9t \u0111\u0129a kim lo\u1ea1i ho\u1eb7c polymer m\u1ecfng c\u00f3 c\u00e1c l\u1ed7 c\u1eaft) n\u1eb1m gi\u1eefa hai t\u1ea5m lapping ph\u1eb3ng. C\u1ea3 hai t\u1ea5m \u0111\u1ec1u quay \u2014 th\u01b0\u1eddng theo c\u00e1c h\u01b0\u1edbng ng\u01b0\u1ee3c nhau \u2014 trong khi b\u1ed9 g\u00e1 di chuy\u1ec3n theo qu\u1ef9 \u0111\u1ea1o gi\u1eefa ch\u00fang. B\u00f9n m\u00e0i kim c\u01b0\u01a1ng \u0111\u01b0\u1ee3c c\u1ea5p v\u00e0o gi\u1eefa c\u00e1c t\u1ea5m v\u00e0 chi ti\u1ebft gia c\u00f4ng.<\/p>\n\n\n\n

    S\u1ef1 kh\u00e1c bi\u1ec7t ch\u00ednh so v\u1edbi lapping m\u1ed9t m\u1eb7t: c\u1ea3 hai m\u1eb7t \u0111\u01b0\u1ee3c x\u1eed l\u00fd \u0111\u1ed3ng th\u1eddi d\u01b0\u1edbi \u00e1p l\u1ef1c b\u1eb1ng nhau.<\/strong> \u0110i\u1ec1u n\u00e0y t\u1ef1 \u0111\u1ed9ng c\u1ea3i thi\u1ec7n \u0111\u1ed9 song song v\u00ec b\u1ea5t k\u1ef3 \u0111i\u1ec3m cao n\u00e0o tr\u00ean m\u1ed9t trong hai m\u1eb7t s\u1ebd nh\u1eadn \u0111\u01b0\u1ee3c \u00e1p l\u1ef1c ti\u1ebfp x\u00fac l\u1edbn h\u01a1n v\u00e0 \u0111\u01b0\u1ee3c lo\u1ea1i b\u1ecf \u01b0u ti\u00ean.<\/p>\n\n\n\n

    C\u00e1c Th\u00f4ng S\u1ed1 Quan Tr\u1ecdng C\u1ee7a Quy Tr\u00ecnh<\/h3>\n\n\n\n
    Tham s\u1ed1<\/th>Ph\u1ea1m vi \u0111i\u1ec3n h\u00ecnh cho Germanium<\/th>\u1ea2nh h\u01b0\u1edfng<\/th><\/tr><\/thead>
    V\u1eadt li\u1ec7u \u0111\u0129a m\u00e0i<\/td>Gang (c\u00f3 r\u00e3nh)<\/td>Cung c\u1ea5p b\u1ec1 m\u1eb7t tham chi\u1ebfu ph\u1eb3ng<\/td><\/tr>
    K\u00edch th\u01b0\u1edbc h\u1ea1t b\u1ed9t kim c\u01b0\u01a1ng<\/td>9 \u03bcm \u2192 3 \u03bcm (hai giai \u0111o\u1ea1n)<\/td>Th\u00f4 h\u01a1n \u0111\u1ec3 lo\u1ea1i b\u1ecf, m\u1ecbn h\u01a1n \u0111\u1ec3 ho\u00e0n thi\u1ec7n<\/td><\/tr>
    \u00c1p su\u1ea5t m\u00e0i<\/td>0.5\u20132.0 psi (3.4\u201313.8 kPa)<\/td>Cao h\u01a1n = lo\u1ea1i b\u1ecf nhanh h\u01a1n nh\u01b0ng g\u00e2y h\u01b0 h\u1ea1i d\u01b0\u1edbi b\u1ec1 m\u1eb7t nhi\u1ec1u h\u01a1n<\/td><\/tr>
    T\u1ed1c \u0111\u1ed9 \u0111\u0129a<\/td>20\u201360 rpm<\/td>\u1ea2nh h\u01b0\u1edfng \u0111\u1ebfn t\u1ed1c \u0111\u1ed9 lo\u1ea1i b\u1ecf v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u<\/td><\/tr>
    N\u1ed3ng \u0111\u1ed9 b\u1ed9t<\/td>0.5\u20132.0 carat\/l\u00edt<\/td>Qu\u00e1 th\u1ea5p = c\u00e0o x\u01b0\u1edbc; qu\u00e1 cao = l\u00e3ng ph\u00ed<\/td><\/tr>
    M\u1ee5c ti\u00eau lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u<\/td>15\u201330 \u03bcm m\u1ed7i m\u1eb7t<\/td>\u0110\u1ee7 \u0111\u1ec3 lo\u1ea1i b\u1ecf l\u1edbp h\u01b0 h\u1ea1i do d\u00e2y c\u01b0a<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

    Ph\u01b0\u01a1ng ph\u00e1p m\u00e0i hai giai \u0111o\u1ea1n<\/h3>\n\n\n\n

    \u0110\u1ed1i v\u1edbi germanium, quy tr\u00ecnh m\u00e0i hai giai \u0111o\u1ea1n cho k\u1ebft qu\u1ea3 t\u1ed1t nh\u1ea5t:<\/p>\n\n\n\n

    Giai \u0111o\u1ea1n 1 \u2014 M\u00e0i th\u00f4 (kim c\u01b0\u01a1ng 9 \u03bcm)<\/strong><\/p>\n\n\n\n